BibTeX record conf/case/PurwinsNBHKLPW11

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@inproceedings{DBLP:conf/case/PurwinsNBHKLPW11,
  author       = {Hendrik Purwins and
                  Ahmed Nagi and
                  Bernd Barak and
                  Uwe Hockele and
                  Andreas Kyek and
                  Benjamin Lenz and
                  Gunter Pfeifer and
                  Kurt Weinzierl},
  title        = {Regression methods for prediction of {PECVD} Silicon Nitride layer
                  thickness},
  booktitle    = {{IEEE} Conference on Automation Science and Engineering, {CASE} 2011,
                  Trieste, Italy, Aug. 24-27, 2011},
  pages        = {387--392},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/CASE.2011.6042426},
  doi          = {10.1109/CASE.2011.6042426},
  timestamp    = {Wed, 16 Oct 2019 14:14:53 +0200},
  biburl       = {https://dblp.org/rec/conf/case/PurwinsNBHKLPW11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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