BibTeX record conf/mhs/HasegawaSMA17

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@inproceedings{DBLP:conf/mhs/HasegawaSMA17,
  author       = {Noriaki Hasegawa and
                  Shinya Sakuma and
                  Yuichi Murozaki and
                  Fumihito Arai},
  title        = {Mechanical characterization of ultra-thin membrane using force sensing
                  chip},
  booktitle    = {International Symposium on Micro-NanoMechatronics and Human Science,
                  {MHS} 2017, Nagoya, Japan, December 3-6, 2017},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/MHS.2017.8305275},
  doi          = {10.1109/MHS.2017.8305275},
  timestamp    = {Wed, 16 Oct 2019 14:14:50 +0200},
  biburl       = {https://dblp.org/rec/conf/mhs/HasegawaSMA17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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