BibTeX record conf/mhs/WatanabeNJMH14

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@inproceedings{DBLP:conf/mhs/WatanabeNJMH14,
  author       = {Shigetaka Watanabe and
                  Yutaka Nakamitsu and
                  Sakurai Junpei and
                  Mizue Mizojiri and
                  Seiichi Hata},
  title        = {Two-axis scanning micro mirror device with thick film metallic glass
                  Cu-Zr-Ti and Parylene-C},
  booktitle    = {2014 International Symposium on Micro-NanoMechatronics and Human Science,
                  {MHS} 2014, Nagoya, Japan, November 10-12, 2014},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2014},
  url          = {https://doi.org/10.1109/MHS.2014.7006094},
  doi          = {10.1109/MHS.2014.7006094},
  timestamp    = {Sat, 30 Sep 2023 09:52:39 +0200},
  biburl       = {https://dblp.org/rec/conf/mhs/WatanabeNJMH14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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