BibTeX record conf/nems/KimYA17

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@inproceedings{DBLP:conf/nems/KimYA17,
  author       = {Jungkwun J. K. Kim and
                  Yong{-}Kyu Yoon and
                  Mark G. Allen},
  title        = {Double-side exposure {UV-LED} {CNC} lithography for fine 3D microfabrication},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {463--466},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017065},
  doi          = {10.1109/NEMS.2017.8017065},
  timestamp    = {Sat, 11 Sep 2021 23:19:19 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/KimYA17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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