BibTeX record conf/nems/WuBTAZB13

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@inproceedings{DBLP:conf/nems/WuBTAZB13,
  author       = {Songmei Wu and
                  M.{-}O. Bammatter and
                  Wei Tang and
                  V. Auzelyte and
                  Haixia Zhang and
                  Juergen Brugger},
  title        = {High aspect ratio etching of nanopores in {PECVD} SiC through {AAO}
                  mask},
  booktitle    = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages        = {986--989},
  publisher    = {{IEEE}},
  year         = {2013},
  url          = {https://doi.org/10.1109/NEMS.2013.6559887},
  doi          = {10.1109/NEMS.2013.6559887},
  timestamp    = {Sat, 30 Sep 2023 09:53:55 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WuBTAZB13.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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