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BibTeX record conf/nems/WuBTAZB13
@inproceedings{DBLP:conf/nems/WuBTAZB13, author = {Songmei Wu and M.{-}O. Bammatter and Wei Tang and V. Auzelyte and Haixia Zhang and Juergen Brugger}, title = {High aspect ratio etching of nanopores in {PECVD} SiC through {AAO} mask}, booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013}, pages = {986--989}, publisher = {{IEEE}}, year = {2013}, url = {https://doi.org/10.1109/NEMS.2013.6559887}, doi = {10.1109/NEMS.2013.6559887}, timestamp = {Sat, 30 Sep 2023 09:53:55 +0200}, biburl = {https://dblp.org/rec/conf/nems/WuBTAZB13.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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