BibTeX record conf/nems/XiaQZSG17

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@inproceedings{DBLP:conf/nems/XiaQZSG17,
  author       = {Changfeng Xia and
                  Dayong Qiao and
                  Yalong Zhang and
                  Xiaocao Su and
                  Zhounan Guo},
  title        = {A position feedback solution based on the acoustic signal produced
                  by electrostatically driven {MEMS} scanning mirror},
  booktitle    = {12th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
                  2017},
  pages        = {558--561},
  publisher    = {{IEEE}},
  year         = {2017},
  url          = {https://doi.org/10.1109/NEMS.2017.8017084},
  doi          = {10.1109/NEMS.2017.8017084},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XiaQZSG17.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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