BibTeX record conf/nems/ZhangWXC10

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@inproceedings{DBLP:conf/nems/ZhangWXC10,
  author       = {Qiuping Zhang and
                  Li Wen and
                  Weiwei Xiang and
                  Jiaru Chu},
  title        = {Fabrication and performance of Microplasma Reactor for maskless scanning
                  plasma etching},
  booktitle    = {5th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2010, Xiamen, China, January 20-23, 2010},
  pages        = {211--214},
  publisher    = {{IEEE}},
  year         = {2010},
  url          = {https://doi.org/10.1109/NEMS.2010.5592188},
  doi          = {10.1109/NEMS.2010.5592188},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangWXC10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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