BibTeX record journals/ibmrd/CoteNSATCL99

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@article{DBLP:journals/ibmrd/CoteNSATCL99,
  author       = {Donna R. Cote and
                  Son Van Nguyen and
                  Anthony K. Stamper and
                  Douglas S. Armbrust and
                  Dirk Tobben and
                  Richard A. Conti and
                  Gill Yong Lee},
  title        = {Plasma-assisted chemical vapor deposition of dielectric thin films
                  for {ULSI} semiconductor circuits},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {43},
  number       = {1},
  pages        = {5--38},
  year         = {1999},
  url          = {https://doi.org/10.1147/rd.431.0005},
  doi          = {10.1147/RD.431.0005},
  timestamp    = {Fri, 13 Mar 2020 10:54:52 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/CoteNSATCL99.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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