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BibTeX record journals/ibmrd/GusevLGGG99
@article{DBLP:journals/ibmrd/GusevLGGG99, author = {Evgeni P. Gusev and Hsu{-}Chang Lu and Eric L. Garfunkel and Torgny Gustafsson and Martin L. Green}, title = {Growth and characterization of ultrathin nitrided silicon oxide films}, journal = {{IBM} J. Res. Dev.}, volume = {43}, number = {3}, pages = {265--286}, year = {1999}, url = {https://doi.org/10.1147/rd.433.0265}, doi = {10.1147/RD.433.0265}, timestamp = {Fri, 13 Mar 2020 10:54:32 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/GusevLGGG99.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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