BibTeX record journals/ibmrd/Nguyen99

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@article{DBLP:journals/ibmrd/Nguyen99,
  author       = {Son Van Nguyen},
  title        = {High-density plasma chemical vapor deposition of silicon-based dielectric
                  films for integrated circuits},
  journal      = {{IBM} J. Res. Dev.},
  volume       = {43},
  number       = {1},
  pages        = {109--126},
  year         = {1999},
  url          = {https://doi.org/10.1147/rd.431.0109},
  doi          = {10.1147/RD.431.0109},
  timestamp    = {Fri, 13 Mar 2020 10:54:38 +0100},
  biburl       = {https://dblp.org/rec/journals/ibmrd/Nguyen99.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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