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BibTeX record journals/ibmrd/ShawGLCH97
@article{DBLP:journals/ibmrd/ShawGLCH97, author = {Jane M. Shaw and Jeffrey D. Gelorme and Nancy C. LaBianca and Will E. Conley and Steven J. Holmes}, title = {Negative photoresists for optical lithography}, journal = {{IBM} J. Res. Dev.}, volume = {41}, number = {1{\&}2}, pages = {81--94}, year = {1997}, url = {https://doi.org/10.1147/rd.411.0081}, doi = {10.1147/RD.411.0081}, timestamp = {Fri, 13 Mar 2020 10:54:43 +0100}, biburl = {https://dblp.org/rec/journals/ibmrd/ShawGLCH97.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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