BibTeX record journals/ieiceee/HigoIIATGYFT06

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@article{DBLP:journals/ieiceee/HigoIIATGYFT06,
  author       = {Akio Higo and
                  Satoshi Iwamoto and
                  Satomi Ishida and
                  Yasuhiko Arakawa and
                  Masatoshi Tokushima and
                  Akiko Gomyo and
                  Hirohito Yamada and
                  Hiroyuki Fujita and
                  Hiroshi Toshiyoshi},
  title        = {Development of high-yield fabrication technique for MEMS-PhC devices},
  journal      = {{IEICE} Electron. Express},
  volume       = {3},
  number       = {3},
  pages        = {39--43},
  year         = {2006},
  url          = {https://doi.org/10.1587/elex.3.39},
  doi          = {10.1587/ELEX.3.39},
  timestamp    = {Sat, 30 Sep 2023 10:14:16 +0200},
  biburl       = {https://dblp.org/rec/journals/ieiceee/HigoIIATGYFT06.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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