BibTeX record journals/ieicet/OhmiTZM18

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@article{DBLP:journals/ieicet/OhmiTZM18,
  author       = {Shun'ichiro Ohmi and
                  Yuya Tsukamoto and
                  Weiguang Zuo and
                  Yasushi Masahiro},
  title        = {PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100)
                  Realized by Dopant Segregation Process},
  journal      = {{IEICE} Trans. Electron.},
  volume       = {101-C},
  number       = {5},
  pages        = {311--316},
  year         = {2018},
  url          = {https://doi.org/10.1587/transele.E101.C.311},
  doi          = {10.1587/TRANSELE.E101.C.311},
  timestamp    = {Sat, 11 Apr 2020 14:47:55 +0200},
  biburl       = {https://dblp.org/rec/journals/ieicet/OhmiTZM18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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