BibTeX record journals/ijmtm/KadavasalCEB05

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@article{DBLP:journals/ijmtm/KadavasalCEB05,
  author       = {Muthukkumar S. Kadavasal and
                  Abhijit Chandra and
                  Sutee Eamkajornsiri and
                  Ashraf{-}F. Bastawros},
  title        = {Yield improvement via minimisation of step height non-uniformity in
                  chemical mechanical planarisation {(CMP)} with pressure and velocity
                  as control variables},
  journal      = {Int. J. Manuf. Technol. Manag.},
  volume       = {7},
  number       = {5/6},
  pages        = {467--489},
  year         = {2005},
  url          = {https://doi.org/10.1504/IJMTM.2005.007698},
  doi          = {10.1504/IJMTM.2005.007698},
  timestamp    = {Thu, 04 Jun 2020 19:36:21 +0200},
  biburl       = {https://dblp.org/rec/journals/ijmtm/KadavasalCEB05.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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