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BibTeX record journals/mj/MehtaSMK04
@article{DBLP:journals/mj/MehtaSMK04, author = {Sohan Singh Mehta and Navab Singh and Moitreyee Mukherjee{-}Roy and Rakesh Kumar}, title = {Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning}, journal = {Microelectron. J.}, volume = {35}, number = {7}, pages = {621--626}, year = {2004}, url = {https://doi.org/10.1016/j.mejo.2003.10.008}, doi = {10.1016/J.MEJO.2003.10.008}, timestamp = {Sat, 22 Feb 2020 19:33:54 +0100}, biburl = {https://dblp.org/rec/journals/mj/MehtaSMK04.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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