BibTeX record journals/mj/MehtaSMK04

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@article{DBLP:journals/mj/MehtaSMK04,
  author       = {Sohan Singh Mehta and
                  Navab Singh and
                  Moitreyee Mukherjee{-}Roy and
                  Rakesh Kumar},
  title        = {Placement of scattering bars in binary and attenuated phase shift
                  mask for damascene trench patterning},
  journal      = {Microelectron. J.},
  volume       = {35},
  number       = {7},
  pages        = {621--626},
  year         = {2004},
  url          = {https://doi.org/10.1016/j.mejo.2003.10.008},
  doi          = {10.1016/J.MEJO.2003.10.008},
  timestamp    = {Sat, 22 Feb 2020 19:33:54 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/MehtaSMK04.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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