BibTeX record journals/mj/RyuKLSK07

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@article{DBLP:journals/mj/RyuKLSK07,
  author       = {Hyun{-}Kyu Ryu and
                  Yil{-}Wook Kim and
                  Kangtaek Lee and
                  Chee Burm Shin and
                  Chang{-}Koo Kim},
  title        = {A comparative study on a high aspect ratio contact hole etching in
                  {UFC-} and PFC-containing plasmas},
  journal      = {Microelectron. J.},
  volume       = {38},
  number       = {1},
  pages        = {125--129},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.mejo.2006.09.002},
  doi          = {10.1016/J.MEJO.2006.09.002},
  timestamp    = {Sat, 22 Feb 2020 19:33:47 +0100},
  biburl       = {https://dblp.org/rec/journals/mj/RyuKLSK07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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