BibTeX record journals/mr/EbersbergerOB01

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@article{DBLP:journals/mr/EbersbergerOB01,
  author       = {Bernd Ebersberger and
                  Alexander Olbrich and
                  Christian Boit},
  title        = {Scanning probe microscopy in semiconductor failure analysis},
  journal      = {Microelectron. Reliab.},
  volume       = {41},
  number       = {8},
  pages        = {1231--1236},
  year         = {2001},
  url          = {https://doi.org/10.1016/S0026-2714(01)00109-3},
  doi          = {10.1016/S0026-2714(01)00109-3},
  timestamp    = {Sat, 22 Feb 2020 19:27:08 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/EbersbergerOB01.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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