BibTeX record journals/mr/ScholzHSLKB14

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@article{DBLP:journals/mr/ScholzHSLKB14,
  author       = {Philipp Scholz and
                  Norbert Herfurth and
                  Michael Sadowski and
                  Ted R. Lundquist and
                  Uwe Kerst and
                  Christian Boit},
  title        = {Efficient and flexible Focused Ion Beam micromachining of Solid Immersion
                  Lenses in various bulk semiconductor materials - An adaptive calibration
                  algorithm},
  journal      = {Microelectron. Reliab.},
  volume       = {54},
  number       = {9-10},
  pages        = {1794--1797},
  year         = {2014},
  url          = {https://doi.org/10.1016/j.microrel.2014.07.062},
  doi          = {10.1016/J.MICROREL.2014.07.062},
  timestamp    = {Sat, 22 Feb 2020 19:27:16 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/ScholzHSLKB14.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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