BibTeX record journals/mr/WlanisHELSGRM18

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@article{DBLP:journals/mr/WlanisHELSGRM18,
  author       = {Thomas Wlanis and
                  Ren{\'{e}} Hammer and
                  Werner Ecker and
                  Sandrine Lhostis and
                  Cl{\'{e}}ment Sart and
                  S{\'{e}}bastien Gallois{-}Garreignot and
                  Bernhard Rebhan and
                  G{\"{u}}nther A. Maier},
  title        = {Cu-SiO2 hybrid bonding simulation including surface roughness and
                  viscoplastic material modeling: {A} critical comparison of 2D and
                  3D modeling approach},
  journal      = {Microelectron. Reliab.},
  volume       = {86},
  pages        = {1--9},
  year         = {2018},
  url          = {https://doi.org/10.1016/j.microrel.2018.05.005},
  doi          = {10.1016/J.MICROREL.2018.05.005},
  timestamp    = {Mon, 26 Oct 2020 08:59:25 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/WlanisHELSGRM18.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}