BibTeX record journals/siamrev/MadhukarPRW02

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@article{DBLP:journals/siamrev/MadhukarPRW02,
  author       = {Anupam Madhukar and
                  Tyler Parent and
                  I. Gary Rosen and
                  Chunming Wang},
  title        = {An Elementary Model for Control of a Semiconductor Etching Process},
  journal      = {{SIAM} Rev.},
  volume       = {44},
  number       = {4},
  pages        = {678--695},
  year         = {2002},
  url          = {https://doi.org/10.1137/S0036144500382295},
  doi          = {10.1137/S0036144500382295},
  timestamp    = {Tue, 29 Sep 2020 10:58:20 +0200},
  biburl       = {https://dblp.org/rec/journals/siamrev/MadhukarPRW02.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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