BibTeX record journals/tcad/TehHT10

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@article{DBLP:journals/tcad/TehHT10,
  author       = {Siew{-}Hong Teh and
                  Chun{-}Huat Heng and
                  Arthur Tay},
  title        = {Performance-Based Optical Proximity Correction Methodology},
  journal      = {{IEEE} Trans. Comput. Aided Des. Integr. Circuits Syst.},
  volume       = {29},
  number       = {1},
  pages        = {51--64},
  year         = {2010},
  url          = {https://doi.org/10.1109/TCAD.2009.2032360},
  doi          = {10.1109/TCAD.2009.2032360},
  timestamp    = {Mon, 26 Oct 2020 09:00:45 +0100},
  biburl       = {https://dblp.org/rec/journals/tcad/TehHT10.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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