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4th NEMS 2009: Shenzhen, China
- 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. IEEE Computer Society 2009, ISBN 978-1-4244-4629-2

- Lidong Du, Zhan Zhao, Cheng Pang, Zhen Fang, Yonghong Liu, Youjun Han:

Micro solid state silicon plate wind velocity sensor. 1-4 - Haitao Ding, Zhenchuan Yang, Guizhen Yan:

Performance comparison of methods to evading notching effect for SOG structures in DRIE. 5-8 - Ling-min Yu, Chang-Chun Zhu:

Electrophoresis deposition and field emission properties of composites films ZnO nanoneedles/CNTs. 9-12 - Shubin Yan, Yingzhan Yan, Zhe Ji, Baohua Wang, Shaohui Wang, Guoqing Jiang, Jijun Xiong, Xiongying Ye, Zhaoying Zhou, Wendong Zhang

:
A precise measurement of quality factor for Planar Microtoroid Resonators. 13-16 - Xingli Zhang, Zhaowei Sun, Guoqiang Wu:

Molecular dynamics simulation on the out-of plane thermal conductivity of monocrystal germanium thin-film. 17-20 - Xudong Zou, Kenle Chen, Hualiang Zhang, Jinwen Zhang:

Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter. 21-24 - Dong-Ming Fang, Haixia Zhang, Xiao-Lin Zhao:

Tunable MEMS capacitors considering deformation factor. 25-28 - Jikun Yi, Wei Li, Lingfang Wang, Zhiyu Wen:

The simulation of frequency-capacitance characteristics of fresh water conductivity sensor. 29-32 - Shao-Chun Sun, Geng-Chen Shi:

Research on the output characteristics of MEMS convective accelerometer under heavy impact. 33-36 - Jinghui Xu, Weizheng Yuan, Honglong Chang

, Binghe Ma:
Angularly parameterized macromodel extraction for microstructures with a large number of terminals. 37-40 - Michael Kraft

, Haitao Ding:
Sigma-delta modulator based control systems for MEMS gyroscopes. 41-46 - Ruican Hao, Decai Li:

Preparation of kerosene based nano-magnetic fluid and its application in pressure difference sensors. 47-50 - Zhaoxin Geng, Qing Li, Wei Wang, Zhihong Li:

Theoretical analysis and fabrication of PDMS-based surface plasmon resonance sensor chips. 51-54 - Bian Tian, Yulong Zhao, Zhuangde Jiang, Ling Zhang, Nansheng Liao, Yuanhao Liu, Chao Meng:

The analysis and structural design of micro SOI pressure sensors. 55-58 - Kai Yang, Zhigang Li, Yupeng Jing, Dapeng Chen, Tianchun Ye

:
Research on the resonant frequency formula of V-shaped cantilevers. 59-62 - Nor Zaidi Haron, Said Hamdioui, Sorin Cotofana

:
Emerging non-CMOS nanoelectronic devices - What are they?. 63-68 - Tsung-Han Tsai, Dar-Sun Liou, Ping-Hei Chen

, Chin-Ting Yang:
Enhancement of mixing performance of water solutions in a micro-mixer with immiscible ferrofluid. 69-74 - Tao Chen, Liguo Chen, Baixu Liu, Jiachou Wang, Xinxin Li:

Design of a four-arm structure MEMS gripper integrated with sidewall force sensor. 75-79 - Fengtian Han, Zhenbin Fu, Jingxin Dong:

Design and simulation of an active electrostatic bearing for MEMS micromotors. 80-85 - Yibin Gong, Huamin Gao, Xiang Liu, Wenping Liu, Tie Li, Ping Zhou, Yuelin Wang:

Silicon Nanowire fabricated by MEMS technology and its application in biochemical detection. 86-89 - Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun, Yunxia Guo:

Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. 90-93 - Julien Arcamone

, Marc Sansa
, Jaume Verd
, Arantxa Uranga
, Gabriel Abadal
, Núria Barniol, Marc A. F. van den Boogaart, Juergen Brugger, Francesc Pérez-Murano
:
Nanomechanical mass sensor for monitoring deposition rates through confined apertures. 94-97 - Xing Chen, Dafu Cui, Lulu Zhang:

Design and fabrication of microfluidic chip with micro/nano structures. 98-101 - Hai Liu, Xiaohang Chen, Dong Xu, Zhongyu Hou, Yafei Zhang:

Microfabricated breath sensor based on carbon nanotubes for respiration monitoring. 102-105 - Wenli Zhou, Sanping Wan, Chao Zhu:

Analysis on electro-thermal property of micro-bubble generator using carbon nanotube heating elements. 106-111 - Tan D. Tran, Minh D. Nguyen, Long T. Nguyen, Tue Huu Huynh, Thuy P. Nguyen:

Novel synthesis design of a 3-DOF silicon piezoresistive micro accelerometer. 112-115 - Haibo Yu, Niandong Jiao, Zaili Dong, Yanli Qu, Wen Jung Li

, Yuechao Wang:
Nanoscale welding by AFM tip induced electric field. 116-120 - Haijun Zhang

, Changsheng Zhu, Qin Yang:
Effect of effective viscosity on characteristics of microscale gas journal bearings. 121-125 - Liqiang Xie

, Dingbang Xiao, Haoxu Wang
, Xuezhong Wu, Shengyi Li:
Sensitivity analysis and structure design for tri-mass structure micromachined gyroscope. 126-129 - Yi Liu, Yaquan Tang, Xiaomei Yu:

SOI-based capacitive micromechanical resonator with submicron gap-spacing. 130-133 - Dong Ying, Wei Gao

, You Zheng:
Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton. 134-138 - Haitao Cheng, Heng Yang

, Yuelin Wang:
Fabrication of nanobeam using Focused ion beam (FIB) and KOH etching. 139-142 - Hua Sun, Haixu Zhou, Xiang Li, Yanhui Wei, Xiao Li:

Design of two-wheel self-balanced electric vehicle based on MEMS. 143-146 - Huiqi He, Donald C. Chang, Yi-Kuen Lee:

Battery-powered miniaturized electroporation system for in-situ gene transfer in stem cell research. 147-151 - Kenle Chen, Yueyang Dai, Xudong Zou, Jinwen Zhang:

A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge. 152-155 - Lingyun Wang, Yibo Zeng, Wenwang Li, Daoheng Sun:

Etch-back in DDSOG process by ultrasonic agitation and application to tunneling gyroscope fabrication. 156-159 - Qijun Xiao, Wenyuan Chen, Gaoyin Ma, Feng Cui, Shengyong Li, Weiping Zhang:

Simulation of levitation control for a micromachined electrostatically levitated gyroscope. 160-163 - Jia-Hong Zhang, Qing-An Huang

, Hong Yu:
Effect of temperature and elastic constant correction on piezoresistivity of silicon nanobeams. 164-167 - Chi-Yuan Lee, Shuo-Jen Lee, Yuh-Chung Hu, Chen-Hen Lin, Yu-Ming Lee, Wei-Yuan Fan:

Integration of micro temperature sensor and metal foil as gas diffusion layer for micro fuel cell. 168-171 - Chi-Yuan Lee, Shuo-Jen Lee, Wen-Pin Shih

, Chen-Hen Lin, Chi-Chung Chang, Pei-Zen Chang:
Fabrication of micro temperature sensor and heater in a stainless steel-based micro reformer. 172-175 - Siva Penmetsa, Tianhua Zhang, Zhongcheng Gong, Tae-woo Lee, Long Que:

Design and modeling of a tunable optical antenna enabled by a micromachined actuator. 176-180 - Tianhua Zhang, Zhongcheng Gong, Long Que:

A white-light source operated polymer-based micromachined Fabry-Perot chemo/biosensor. 181-184 - Wang Ya-Zhou, Chen Li-Xin, Song Jia-Le:

Characterization of Si3N4/SiC Microstructure Derived from UV curable polymer ceramic precursor pyrolyzing. 185-189 - Hai-Feng Zhang

, Xiao-wei Liui, Zhi-cheng Peng, Xi-Lian Wang, Wei Wang, Yufeng Chen:
Design of movable contactless conductivity detector for microchip capillary electrophoresis. 190-193 - Xiuling Zhang, Feng Jin, Jianxin Xing:

Electroreduction of nitrite based on Ag/PPy nanowires modified electrodes. 194-197 - Xuejiao Fan, Dacheng Zhang:

Parameter characterization of anodic bonded electrical interconnect in MEMS/NEMS devices. 198-201 - Pingan Zhao, Yinqing Li

, Xiangyu Zeng, Jia Zhou, Yiping Huang, Ran Liu:
EWOD using P(VDF-TrFE). 202-205 - Weihua Li, Wenzhong Lou, Xin Li, Rongsen Hong, Liang Hu:

Integration micro-magnetic sensor and accelerometer microsystem for orienting application. 206-210 - Wei-Hsin Gau, Shin-Chun Huang, Yuh-Chung Hu:

Fabrication and vibration analysis of micro-cross beams. 211-214 - Xu Zhao, Xin Zhao, Guizhang Lu:

State engine based validation of MEMS process sequences. 215-218 - Chen-Hsun Weng, Chih-Chia Huang, Chen-Sheng Yeh, Gwo-Bin Lee

:
Using micro-reactors to synthesize alloy FeGa2O4 magnetic nanoparticles. 219-222 - Dar-Bin Shieh, Chia-Chun Hsieh, Song-Bin Huang, Gwo-Bin Lee

:
A microfluidic-based cell culture platform for cellular and subcellular imaging. 223-226 - Sung-Yi Yang, Fong-Yu Cheng, Chen-Sheng Yeh, Huan-Yao Lei, Gwo-Bin Lee

:
Synthesis of gold nanoparticles using a vortex-type micro-mixing system. 227-230 - Xing Song, Haifeng Dong, Jiancheng Fang:

Chip scale atomic magnetometer based on SERF. 231-234 - Liang Hu, Wenzhong Lou, Renlong Song, Chao Gao, Xin Li:

A novel design of micro-magnetic sensor guidance system for the blind. 235-237 - Yang Yang, Jing Liu:

Controlling of micro/nano fluidics array using single ice valve. 238-243 - Yang Yang, Jing Liu:

Theoretical characterization on nano freeze tweezer enabled from convective cooling principle. 244-248 - Chi-Chang Lin, Chen-Yuan Yu, Ying-Mei Yang, Yung-Ming Chu, Hong-Ping Lin

, Hsien-Chang Chang:
A novel SERS active particle with highly bio-organics absorption affinity for the description of bacteria fingerprint. 249-252 - Jianbing Xie, Weizheng Yuan, Honglong Chang

:
A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. 253-256 - Yunhuan Zheng, Jianzhang Wu, Jianbo Shao, Qinghui Jin, Jianlong Zhao:

Development of a novel perfusion microfluidic cell culture device for cell-based assays. 257-260 - Wenzhong Lou, Renlong Song, Yunjian Liu, Xiaosong Liu, Weihua Li, Wanfeng Lin:

A novel multi-direction high shock reliability test on MEMS devices. 261-264 - Zhigang Che, Liangcai Xiong, Tielin Shi, Zirong Tang, Huayang Cheng, Likun Yang:

Numerical and experimental study of Microscale Laser Shock Processing using excimer laser. 265-269 - Cheng Pang, Zhan Zhao, Jiangang Zhang, Li Shi, Lidong Du

, Zhen Fang, Yonghong Liu
:
An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station. 270-273 - Chen-Kuei Chung

, W. T. Chang:
Comparison of methods for sensing contact potential difference of nanocrystalline alloy films using a kelvin actuating capacitor. 274-277 - Zhongcheng Gong, Krithika Nagarajan, Siva Penmetsa, David Mills, Long Que:

A patch-clamp device with integrated actuators for cell selection and positioning. 278-281 - Gaoyin Ma, Wenyuan Chen, Qijun Xiao, Weiping Zhang, Feng Cui, Kai Li:

Single-neuron spinning control system for a non-silicon micromachined rotational gyro. 282-285 - Yan Cui, Huilin Chen, Jinsong Xia, Jiaxin Zhao, Jing Wang, Liding Wang:

Study on PSZT thin films for microforce sensors. 286-290 - Yipeng Lu, Weiping Zhang, Xiaosheng Wu, Wenyuan Chen, Feng Cui:

Design and analysis of novel solid biaxial micro-gyroscope with special mode excitation. 291-294 - Jizhou Sun, Chao Bian

, Lan Qu, Shanhong Xia:
A micro amperometric immunosensor immobilized with electropolymerized staphylococcal protein a for the detection of salmonella typhimurium. 295-298 - Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip D. Prewett, Kyle Jiang:

Characterization of line edge roughness and line width roughness of nano-scale typical structures. 299-303 - Xiaosheng Wu, Wenyuan Chen, Weiping Zhang, Yipeng Lu, Feng Cui, Xiaolin Zhao:

Modeling analysis of piezoelectric micromachined modal gyroscope (PMMG). 304-309 - Yinhong Dai, Donghang Chen, Lingyun Wang, Daoheng Sun:

Investigations on electrohydrodynamical drop-on-demand inkjet printing. 310-313 - Yu-Cheng Ou, Chih-Wen Hsu, Lung-Jieh Yang

, Hsieh-Cheng Han, Yi-Wen Liu, Chien-Yuan Chen:
The micropatterns of glutaraldehyde-crosslinked gelatin as ECM for attachment of tumor cells. 314-318 - Chenying Yang, Wei Wang, Zhihong Li:

Optimization of corona-triggered PDMS-PDMS bonding method. 319-322 - Jing Wang, Bing Qu, Yan Ming Su, Chao Pan, Wei Guo Cai:

Artifical fish flocked surface as a possible anti-biofoulant. 323-326 - Ke Tao, Dexian Zhang, Yun Sun, Linshen Wang, Jingfang Zhao, Ying Xue, Yuanjian Jiang, Hongkun Cai, Yanping Sui, Jin Wang:

Boron doped hydrogenated nanocrystalline silicon thin films prepared by layer-by-layer technique and its application in n-i-p flexible amorphous silicon thin film solar cells. 327-330 - Jin Wang, Guofeng Li, Yiyi Liu, Yi Lu, Xianhu Gao, Yong Zhang, Ke Tao:

Vehicle supervision system based on MEMS geomagnetic sensor. 331-334 - Yi Jae Lee

, Jung Doo Kim, Jae Yeong Park
:
Nafion coated enzyme free glucose micro-biosensors for anti-fouling of protein. 335-338 - Dingbang Xiao, Liqiang Xie

, Zhanqiang Hou, Xuezhong Wu, Shengyi Li:
Analyzing the frequency response of micromachined capacitive inertial devices by the third harmonic detection. 339-342 - Xiuling Ji, Yunjian Liu, Wenzhong Lou:

Design and parametric study of a tubular passive micro direct methanol fuel cell. 343-347 - Kashif Naeem

, Ouyang Feng:
Effect of calcination on photocatalytic activity of Fe3+-doped TiO2 nanoparticles for degradation of phenol under UV irradiation. 348-352 - Ping Tang, Jian Yang, Jianjun Ye, Jinyang Zheng, Chikong Lam, Ieong Wong, Yanbao Ma:

Using the improved DSMC method to predict the reliability of micro-flow channels. 353-358 - Fu-Wen Yeh, Lung-Jieh Yang

, Guo-Yuan Hess, Ching-Jiun Lee, Che-Chien Chu, Horn-Jiunn Sheen:
The arrowed surface ratchets with hydrophobic parylene for droplet transportation. 359-362 - Kuan-Yu Chen, Ju-Nan Kuo:

Diffraction angle prediction of surface micromachined planar curved grating and crossed grating. 363-366 - Guangmei Zhai, Daoli Zhang, Lin Yuan, Jianbing Zhang:

Synthesis and studies of spindle-shaped lead selenide nanocrystals. 367-370 - Jia Hao Zhao, Shi Jie Yu, Ke Li, Ying Dong, Qin Zhou, Zheng You:

Improvement of a micro-beam in a smart gas sensor with resonating mechanism. 371-375 - Guanggui Cheng, Jianning Ding, Biao Kan, Junziong Wang, Ningyi Yuan:

Study on the electrical contact property at the interface of the NiCr/TiW films. 376-379 - Khashayar Babaei Gavan, Joost van der Heijden

, Emile W. J. M. van der Drift, Herre S. J. van der Zant:
Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers. 380-384 - Hung-Chia Lin, Yi-Ju Liu, Da-Jeng Yao:

DNA ligation using coplanar electrodes electro-wetting-ondielectric (EWOD) device. 385-389 - Fei-Bin Hsiao, Yung-Chun Lee, Lee Chang Hsiang:

Lamb wave excitation on non-piezoelectric materials using Lorentz force induced by current in meander line structure. 390-395 - Weiping Chen, Xiaoliang Chen, Guoguang Zheng, Xiaowei Liu, Haifeng Zhang:

Analysis of the self-test characteristics of a micromachined accelerometer. 396-399 - Hamed Sadeghian, Chung Kai Yang, Khashayar Babaei Gavan, Hans Goosen

, Emile W. J. M. van der Drift, Here van der Zant, Paddy J. French, Andre Bossche, Fred van Keulen
:
Surface contamination-induced resonance frequency shift of cantilevers. 400-403 - Jinhui Lan, Yuqiao Shi:

Vehicle detection and recognition based on a MEMS magnetic sensor. 404-408 - Aimiao Qin, Yuzi Liu

, Zhong Lin Wang
:
Solution growth of HgTe Nanoweires at lowtemperature. 409-412 - J. N. Ding, H. S. Qi, N. Y. Yuan, Y. L. He, G. G. Cheng:

Influence of post-annealing on the mechanical and electrical properties of boron-doped nanocrystalline silicon thin films. 413-415 - Sen Yao, Shunji Goto, Junpei Sakurai, Tadahiko Shinshi, Minoru Uehara, Hitoshi Yamamoto:

SiN-based micro cantilever actuators using NdFeB/Ta permanent magnetic thin film. 416-419 - Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou:

Optimization of process parameters based on ANN when synthesizing nano-size hydroxyapatite using Solgel method. 420-423 - Zongwei Niu, Zhiyong Li, Li Li, Rongguo Hou:

Thermodynamics analyse of the synthesizing of nano-size hydroxyapatite using Sol-gel method. 424-427 - Gang Zhao, Wen Li, Guanrong Tang, Jing Chen:

Fabrication of bulk titanium out-of-plane microneedles. 428-431 - Yue Chen, Xiuhan Li, Dong-Ming Fang, Quan Yuan, Haixia Zhang:

Spiral capacitor based on copper electroplating. 432-435 - Jinxing Wang, Apurba Laha, Andreas Fissel

, Dominik Schwendt, Rytis Dargis, Tatsuro Watahiki, Roman Shayduk, Wolfgang Braun, Tianmo Liu, H. Jörg Osten:
Structural and strain relaxation study of epitaxially grown nano-thick Nd2O3/Si(111) heterostructure. 436-440 - Yi Zhou, Fei Ding, Chao Ni, Wei Wang, Wengang Wu:

Bottom-up fabrication of special parylene films based on selective growth on Au-coated surface. 441-444 - Shailesh Madisetti, Zhiguo Zheng

, Zhongcheng Gong, Siva Penmetsa, Yuri Lvov, Long Que:
Layer-by-layer nanoscale-coating of microparticles with a droplet microfluidic device. 445-448 - Qinglong Zheng, Zhuo Wang, Yong Xu:

Design and optimization of parylee nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing. 449-453 - Sewan Park, Joonyeop Lee, Hyeon Cheol Kim, Kukjin:

A study on inteference between 3D MEMS inductor and VCO. 454-457 - Yuguang Li, Yinfeng Liu, Liping Wang, Beilei Gu, Haiyan Mao, Hefeng Hu, Li Liu, Ying Gu, Yiben Xia:

UV absorption and photoluminescence of nanometer-sized ZnS prepared by different routes. 458-462 - Huiqi He, Donald C. Chang, Yi-Kuen Lee:

Battery-powered miniaturized electroporation system for in-situ gene transfer in stem cell research. 463-467 - Chaohui Wang, Peng Ye, Kerun Lee, Jingju Wang, Jing Wang:

The design and fabrication of a new blood-filtering chip based on SU-8 and PDMS. 468-471 - Lei Nie, Tielin Shi, Zirong Tang, Shiyuan Liu, Guanglan Liao:

Low temperature direct bonding for hermetic wafer level packaging. 472-475 - Xuezhong Wu, Peitao Dong, Zhaoze li, Shengyi Li, Qinghui Liu, Chao Xu, Hong Wan:

Design, fabrication and characterization of a solid propellant micro-Thruster. 476-479 - Jing Zhang, Kaizhou Tan, Siliu Xu, Zhengfan Zhang, Yukui Liu, Guangbing Chen, Kaicheng Li, Heming Zhang, Huiyong Hu:

A novel p+ Poly-SiGe Gate CMOS device. 480-484 - T. W. Chang, T. J. Chung, T. Ru, Tzer-En Nee

, H. C. Lu, G. M. Wu:
Investigation of InGaN/GaN multiple quantum wells with strain relief behavior for light-emitting diodes. 485-488 - Guangyi Shi, Yuexian Zou, Yufeng Jin, Yali Zheng, Wen Jung Li

:
Multi-category human motion recognition based on MEMS inertial sensing data. 489-493 - Li Zhang, Jun Yao, Dajia Wang, Hongsheng Zhong:

Distributed MEMS transmission line-based uniplanar compact electromagnetic bandgap (UC-EBG) tunable filters. 494-497 - Xuebin Lu, Xiaowei Liu, Rongyan Chuai, Changzhi Shi, Mingxue Huo, Weiping Chen:

Piezoresistive properties of heavily doped P-type polysilicon films. 498-501 - Liang Yin, Xiaowei Liu, Wei Chen, Weiping Chen, Zhiping Zhou:

A low-noise CMOS interface circuit for closed-loop accelerometer. 502-505 - Xu Mao, Zhenchuan Yang, Zhihong Li, Guizhen Yan:

The method of prevent footing effect in making SOI micro-mechanical structure. 506-509 - Yuntao Liu, Xiaowei Liu, Liang Yin, Weiping Chen, Qun Wu:

CMOs interface circuitry for a closed-loop capacitive MEMS accelerometer. 510-513 - Gang Zhao, Yao Tian, Qiong Shu, Jing Chen:

Evalution of bulk titanium DRIE Using SU-8 as soft mask. 514-517 - Chen-Chieh Liao, Ju-Nan Kuo:

Shape and thermal effects of metal films on stress-induced bending of surface micromachined curved grating. 518-521 - Qingzhou Li, Ping Song, Kejie Li:

Structure optimization of a monolithic high-shock three-axis piezoresistive accelerometer using Ant Colony Optimization. 522-526 - Chen-Kuei Chung

, T. R. Shih, B. H. Wu:
Simulation of the novel micro-valve using dynamic analysis. 527-530 - Chuanwei Zhang, Shiyuan Liu, Tielin Shi:

Metrology of deep trench structures with polarized FTIR reflectance spectrum. 531-534 - Chen-Kuei Chung

, T. R. Shih, B. H. Wu:
Characteristics of truncate-angle rhombic micromixer and rapid mold fabrication using CO2 laser micromachining. 535-538 - Jenn-Sen Lin, Shin-Pon Ju

, Shih-Wen Yung, Wen-Shian Wu, Meng-Hsiung Weng, Wen-Jay Lee:
Mechanical and dynamical behavior of carbon nanotube with defects: A molecular dynamics simulation. 539-542 - Guo L. Sun, Hai R. Wang, Zhuang D. Jiang, Xian N. Gao, Tian S. Yin, Guo Q. Han:

Design of Pt electrode in a SO2 gas sensor based on LaF3solid electrolyte. 543-546 - Shuhua Wei, Jinzhao Zhang, Li Han:

Design and implementation of software system of E-beam lithography based on SEM. 547-550 - Chen-Kuei Chung

, Y. L. Chang, T. S. Chen:
Influence of substrate bias on the resistivity and TCR of nanostructured Ta-Si-N films. 551-554 - Yumei Xing, Yigui Li, Junfeng Zhang, Gaoyang Gao:

Surface acoustic wave linear motor for two-dimensional optical positioning system. 555-558 - Fubo Rao, Tie Li, Yuelin Wang:

Synthesis of horizontally aligned single-walled carbon nanotubes without external force and their growth characteristics. 559-562 - Yuexian Zou, Guangyi Shi, Yufeng Jin, Yali Zheng:

Extraocular image processing for retinal prosthesis based on DSP. 563-566 - Fei Ding, Wenxuan Yu, Tingting Yu, Chao Ni, Ruyan Tang, Wengang Wu:

A novel integrated micro-scale closed synthetic-jet-like flow field as gas lubrication in MEMS devices. 567-571 - Weiwei Xiang, Li Wen, Hai Wang, Qiuping Zhang, Jiaru Chu:

Electrical and optical testing system for microplasma in scanning plasma etching. 572-576 - Li Wen, Qiuping Zhang, Weiwei Xiang, Hai Wang, Jiaru Chu:

Design and fabrication of the microplasma reactor for maskless scanning plasma etching. 577-580 - Lujun Zhang, Andre Bossche:

Low voltage plug dispersion compensation for moving field capillary electrophoresis with flow loss via the side channels. 581-584 - Yeon H. Kwak, Soon S. Park, Sung M. Hong:

A new 2D structure for chemotaxis measurement of adhesive cells. 585-588 - Dezhi Wu, Lingyun Wang, Daoheng Sun:

Patterned deposition of PEO nanofibers. 589-592 - Di Wang, Xiaodong Chen, Qun Zhang, Yu Liu, Jincheng Liu, Lijiang Hu:

Calculation of phase transformation of vanadium oxide using MD simulation and its validation by experimental values. 593-596 - Lan Qu, Chao Bian, Jizhou Sun, Zhenxing Ren, Jinghong Han, Shanhong Xia:

Electrochemical synthesis of gold nanoparticles in polypyrrole for antibody immobilization. 597-600 - Di Wu, Haiyang Mao, Wengang Wu:

Fabrication of compact collateral silicon nanowires based on continuously alternating deposition. 601-604 - Yu Liu, Zushun Lu, Xiaodong Chen, Di Wang, Jincheng Liu, Lijiang Hu:

Study on phenolic-resin/carbon-fiber ablation composites modified with polyhedral oligomeric silsesquioxanes. 605-608 - Ki-Young Dong, Youngmin, Seung-Il Moon, Jinwoo Lee, Jinnil Choi, Byeong-Kwon Ju:

Design of a multi-walled carbon nanotubes vacuum gauge. 609-611 - Ahra Lee, SangChul Lee, Sungsik Lee, Chang Han Je, Sunghae Jung, Myoung-Lae Lee, Gunn Hwang, Byoung-Gon Yu, Chang Auck Choi:

Chip scale packaging with surface mountable solder ball terminals for microsensors. 612-615 - Jun Xu, Bo You, Xin Li, Jing Ma:

A high sensitivity quartz tuning fork temperature sensor. 616-619 - Junfeng Zhang, Yigui Li, Chun Hui, Yumei Xing, Yang Gao:

Research on a novel SAW actuator of Floating Electrode Unidirectional Transducer. 620-623 - Jie Gong, Zirong Tang, Tielin Shi, Guanglan Liao, Lei Nie, Shiyuan Liu:

Improved adhesion between C-MEMS and substrate by micromechanical interlocking. 624-627 - Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French:

SOI digital accelerometer based on pull-in time configuration. 628-631 - Yuexian Zou, Yali Zheng, Yufeng Jin, Guangyi Shi:

Signal modulation schemes comparison in the telemetry unit for retinal prosthesis system. 632-636 - Chi-Yuan Lee, Shuo-Jen Lee, Yu-Ming Lee, Kuan-Yu Chu:

Integration of micro flow sensor and flexible substrate as GDL in micro fuel cell. 637-640 - Hsiao-Yeh Chu, Ming-Hang Weng, Ru-Yuan Yang, Chien-Wei Huang, Chia-Hsing Li:

Effect of Al thickness on the Al induced low temperature poly-si film crystallization process. 641-644 - Chakravarthy Yamarthy, Shamus McNamara:

Design of a MEMS sensor to detect the Casimir force. 645-648 - Minh Duc Nguyen, Ruud Johannes Antonius Steenwelle, Paul M. te Riele, Jan Matthijn Dekkers, Dave H. A. Blank, Guus Rijnders:

Ferroelectric and dielectric properties of Pb(Zr, Ti)O3 thin film capacitors. 649-652 - Yuping Zhang, Yanyan Wang, Lanxin Lv, Shancheng Yan, Haitao Wang, Yong Zhang, Dan Zhu, Ningping Huang, Zhongdang Xiao:

Cell affinity of PHBV thin films evaluated by a parallel plate flow chamber. 653-656 - Rawat Jaisutti

, Wittawat Yamwong
, Sirapat Pratontep, Tanakorn Osotchan:
Effect of opposite side electrodes in organic field-effect transistor structure. 657-660 - Zhuangde Jiang, Libo Zhao, Yulong Zhao, Philip D. Prewett, Kyle Jiang:

Research and evaluation of a high temperature pressure sensor chip. 661-665 - Jianjun Ye

, Jian Yang, Jinyang Zheng, Ping Xu, Chikong Lam, Ieong Wong, Yanbao Ma:
Effects of wall temperature on the heat and mass transfer in microchannels using the DSMC method. 666-671 - Henan Ni, Liangcai Wu, Zhitang Song, Chun Hui:

Memory characteristics of double-layer metal and semiconductor heterogeneous nanocrystals embedded in SiO2. 672-675 - Xin Xu, Bogdan Bercu, François Lime

, Laurent Montès
:
Finite elements study of high mechanical stress in nanostructures for innovative NEMS sensors. 676-681 - Huajun Fang, Xingming Liu, Litian Liu:

A uncooled a-Si infrared detector with novel thermal isolation method. 682-685 - Changzhi Shi, Xiaowei Liu, Rongyan Chuai:

DC electrical trimming characteristics of polysilicon nanofilms with different doping concentrations. 686-689 - Shiyou Xu, Yong Shi:

High sensitivity, low operational temperature ITO nano gas sensor with integrated circuits. 690-693 - Surachai Pengmanayol, Tanakorn Osotchan:

Effect of mixing hopping sites for carrier transport in organic semiconductor nanodevices. 694-697 - Dongbing Geng, Liming Zeng, Yi Li:

Thermo-oxidative stability of Nano-SiO2 /bismaleimide composite. 698-702 - Ji-Hong Kim, Sung-Min Hong, Jang-Sub Lee, Byung-Moo Moon, Kunnyun Kim:

High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology. 703-706 - C. C. Su, C. H. Li, N. K. Chang, T. C. Wu, S. H. Chang:

Fabrication of carbon nanocoils based tactile sensor. 707-710 - Amir Farrokh Payam

, Morteza Fathipour, Mohammad Javad Yazdanpanah
:
A backstepping controller for piezoelectric actuators with hysteresis in nanopositioning. 711-716 - Amir Farrokh Payam

, Mohammad Javad Yazdanpanah
, Morteza Fathipour:
Design of a feedforward controller for AFM nanopositioning based on neural network control theory. 717-721 - Guo Q. Han, Zhuang D. Jiang, Wei X. Jing, Hai R. Wang, Guo L. Sun, Ming Z. Zhu:

Fabrication and characterization of nano-scale lines through anodic porous alumina membrane. 722-725 - Jing-Hui Wang, Meng-Ku Chi, Lung-Ming Fu, Che-Hsin Lin

:
Experimental and numerical investigations into high-voltage pulsed DC electric fields for enhancing CE chip performance. 726-730 - Hailin Cong, Tingrui Pan:

Microfabrication of conductive PDMS on flexible substrates for biomedical applications. 731-734 - Hailin Cong, Alexander Revzin, Tingrui Pan:

Micropattern-assisted nanoassembly: Ordered nanocolloidal array on PEG microstructures. 735-738 - Wei Tang, Zhe Chen, Haixia Zhang:

A novel method of anodic bonding. 739-742 - Pin Lv, Zhe Chen, Alice H. X. Zhang:

Effect of laser annealing on amorphous silicon carbide films prepared by PECVD. 743-746 - Tzong-Shyng Leu, Horng-Jiann Song:

New pumping mechanism by surface waves in a microchannel. 747-750 - Chun-Ping Jen

, Ching-Te Huang, Yun-Hung Lu:
Numerical investigation of biochemical binding kinetics on the microfluidic chip with FO-LPR. 751-753 - Deyong Chen, Zhengwei Wu, Xiaojing Shi, Junbo Wang, Lei Liu:

Design and modeling of an electromagnetically excited silicon nitride beam resonant pressure sensor. 754-757 - Guang He, Geng-Chen Shi:

On the mechanical behavior of LIGA nickel. 758-762 - Kui Zou, Xiuhan Li, Haixia Zhang:

Transcutaneous power link design for implanted systems. 763-766 - Yung-Chun Lee, Pin-Chang Chen, Hung-Yi Lin:

Fabrication of seamless roller mold with excimer laser direct writing technology. 767-770 - Yunguang Ji, Yueh-Jaw Lin, Alper Buldum:

An investigation of buckypapers' Young's modulus utilizing nanoscale modeling and Molecular Dynamics simulation. 771-774 - Yung-Chun Lee, Yi-Chien Lin, Chen-Hui Tsai:

A novel method for fabricating aspheric fiber lens and its applications. 775-778 - Yung-Chun Lee, Hsueh-Liang Chen, Chun-Hung Chen, Hung-Yi Lin:

Infrared heating and roller-based contact printing technology for the fabrication of micro/nano-structures. 779-782 - Chen-Kuei Chung

, J. J. Jhu:
Effect of nitrogen flow ratios on microstructure and mechanical properties of nanocomposite Ti-Si-N thin flims. 783-786 - Shou-Ping Hsu, Kao-Feng Yarn, Win-Jet Luo

, I-Ting Hsieh, Hong-Jun Ye, Meng-Hua Chung:
Microfluidic mixing with electrokinetic instability in a double T-shaped microchannel. 787-792 - Chi-Chang Lin, Ying-Mei Yang, Hsien-Chang Chang:

Raman descrimination of Helicobacter pylori fingerprint in dielectrophoresis chip. 793-796 - Xian Huang

, Siqi Li, Jerome Schultz, Qian Wang
, Qiao Lin:
A biocompatible affinity MEMS sensor for continuous monitoring of glucose. 797-802 - Chengkuo Lee

, Jin Xie:
Development of vacuum packaged CMOS thermoelectric energy harvester. 803-807 - Chengkuo Lee

, Wenfeng Xiang, Jayaraj Thillaigovindan, Fu-Li Hsiao:
Nanomechanical cantilever sensor using optical nanocavity resonator. 808-812 - Yanli Qu, Zaili Dong, Steve C. H. Tung, Wen Jung Li

:
Experimental investigation on the dynamic response of thermal EG-CNT flow sensors. 813-817 - Zhen Chen, Yu Zhao, Wei Wang, Zhihong Li:

Microfluidic patterning of nanoparticle monolayer: Mechanism analysis and noncontinuously patterning approach. 818-821 - Michael Junkin, Donna D. Zhang, Pak Kin Wong

:
Plasma lithography for control of cell morphology and proliferation. 822-826 - Mandy L. Y. Sin, Vinay Gidwani, Vincent Gau, Pak Kin Wong:

An electrothermal micromixer for molecular analysis. 827-831 - Vinay Gidwani, Yi Lu, Donna D. Zhang, Pak Kin Wong:

Nanoengineered platforms for cancer chemoprevention. 832-836 - Guanghui Bai, Wei Teng, Xianggang Wang, Hui Zhang, Peng Xu:

Kinetic and processing studies on a novel technology of producing high purity nano-silicon dioxide from an alumina rich coal fly ash with carbon dioxide. 837-842 - Sumana Kladsomboon, Sirapat Pratontep, Theeraporn Puntheeranurak, Teerakiat Kerdcharoen:

Investigation of thermal and methanol-vapor treatments for MgTPP as an optical gas sensor. 843-847 - Drazen Fabris, Tsutomu Saito, Toshishige Yamada, Xuhui Sun, Patrick Wilhite, Cary Y. Yang:

Current capacity and thermal transport in carbon nanofiber interconnects. 848-853 - Cheng-Hsin Chuang, Yu-Chi Chen, You-Ming Hsu, Huei-Sheng Huang, Fei-Bin Hsiao, Chin-Hung Wang:

A DEP chip with arc-shape microelectrode arrays for the separation of different-size particles. 854-857 - Tao Sun, Soichiro Tsuda, Klaus-Peter Zauner, Hywel Morgan

:
Single cell imaging using electrical impedance tomography. 858-863 - Sadollah Ebrahimi

, Jamshid Sabbaghzadeh, Maryamalsadat Lajvardi, Iraj Hadi:
Nanolayer effects in cooling performance of a microchannel heat sink with nanofluids containing CNTs. 864-867 - Yuan Li, Zhenchuan Yang, Guizhen Yan:

An improved method to remove anti-footing Al layer after DRIE. 868-871 - Qiang Liu, Bo Liu, Zhihong Li:

Improvement of Au cantilever fabrication process with Cu as a sacrificial layer. 872-876 - Chi-Chang Lin, Chen-Yuan Yu, Ying-Mei Yang, Yan-Fu Chen, Hsien-Chang Chang:

Functionalized bio-nanoparticles in immunosensing using Surface-Enhanced Raman scattering methods. 877-880 - Jian Luo, Haitao Ding, Michael Kraft:

A new design methodology for electro-mechanical Sigma- Delta-Modulators. 881-884 - Chen-Kuei Chung

, T. C. Chen, T. R. Shih, W. T. Chang:
Fabrication of a novel micro liquid flow sensor using a TaN thin film. 885-888 - Qinghui Liu, Xuezhong Wu, Di Di, Peitao Dong, Dapeng Fan:

Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope. 889-892 - Zhuxin Dong, Uchechukwu C. Wejinya, Wen Jung Li

:
Calibration of MEMS accelerometer based on plane optical tracking technique and measurements. 893-897 - Ding-jun Xu, Zheng-yong Zhang, Zhen Yu:

Analysis on thermal balance and design principles of catalytic combustion gas sensor. 898-903 - Chia-Hsien Yeh, Po-Wen Lin, Qiaole Zhao, Tsung-Che Chou, Yu-Cheng Lin:

Application of microfluidic system to construct cross-linked chitosan microfibers by PDMS chip. 904-906 - Xianju Huang, Yu Tang, Renxin Wang, Chuang Qian, Wei Wang, Zhihong Li:

A novel 3D flexible parylene-metal structure fabrication technique. 907-910 - Shenggui Wang, Liwei Lin

, Hang Guo:
Analysis and design of a micromachined Rb-85 filter in passive rubidium atomic clock. 911-914 - Yi Zhang, Daqun Bao, Hang Guo:

Growth and characterization of PZT thin films with A Pt/Ti layer on silicon substrate. 915-918 - Yu Jin Kim, Il-Kyu Park, Jin Soo Kim, Joon Hwang, Eui-Sik Chung, Kang Moo Huh

, Yong-kyu Lee:
Anticancer drug delivery for tumor targeting and therapy. 919-922 - Anzhou Hou, Henan Ni, Chun Hui, Ailan Xu:

The development of piezoelectric biosensor based on nano-crystalline PZT/quarts. 923-925 - Yanfeng Jiang, Xiaobo Zhang, Bing Yang:

Study on self-alignment property of silicon nanowire in temperature gradient. 926-929 - Yi-Feng Wang, Rui-jin Wang, Ling-na Wang:

Research on mixing mechanism of micromixer based on segmented gas-liquid flow. 930-934 - Shengli Zhou, Qing Shan, Fei Fei, Wen Jung Li

, Chung Ping Kwong, Patrick C. K. Wu, Bojun Meng, Christina K. H. Chan, Jay Y. J. Liou:
Gesture recognition for interactive controllers using MEMS motion sensors. 935-940 - Jeou-Long Lee, Yung-Kang Shen

, Yi Lin, Ping-Tun Teng, Chuan-Min Huang:
Fabrication and analysis of microfluidic mold insert by micro electrical discharge machining. 941-945 - Yiting Yu, Weizheng Yuan, Bin Yan, Taiping Li, Lanlan Wang:

Two new micro programmable gratings and their potential applications. 946-949 - S. Subramanian, J. S. Rathore, N. N. Sharma:

Design and analysis of helical flagella propelled nanorobots. 950-953 - Benjaporn Treetharnmathurot, Chitchamai Ovatlarnporn

, Juraithip Wungsinthaweekul, Ruedeekorn Wiwattanapatapee:
Chemical modification and thermal stability study of ss-cyclodextrin- and PAMAM-trypsin conjugates. 954-959 - Yung-Chiang Chung, Yu-Cheng Lin, Chaung-Di Chueh, Chuan-You Ye, Li-Wei Lai, Wei-Chieh Liao:

Microfluidic chip of fast DNA hybridization using denature and motion of nucleic acids. 960-963 - Ding Yuan, Pengliang Ci, Fei Tian

, Jing Shi, Shaohui Xu
, Peisheng Xin, Lianwei Wang:
The improvement of electrochemical etching process for silicon microchannel plates. 964-969 - Her-Terng Yau

, Cheng-Chi Wang
, Ching-Chang Cho, Ming-Jyi Jang:
Numerical simulation of an electrokinetic micromixer using harmonic and chaotic electric fields. 970-974 - Cheng-Chi Wang

, Her-Terng Yau
, Yen-Liang Yeh, Ming-Jyi Jang, Jing-Fung Lin:
Influence of the bearing number on micro gas bearing system. 975-979 - Ru Zhang, Ying Zhang, Peilin Lang, Yuwen Duan:

Research of nano-material doped fiber in SBS slow light system. 980-982 - Ping Peng, Tielin Shi, Guanglan Liao, Zirong Tang, Chang Liu:

Scratch of submicron grooves on aluminum film with AFM diamond tip. 983-986 - Zhong Cao, Meng-Xue Zeng, Ling Zhang, Xi-Xi Huang, Ming-Xing Wang, Fu-Chun Gong, Shu-Zhen Tan:

Novel optical nanobiosensor assembled with silver nanoparticles on gold surface. 987-990 - Shubin Yan, Baohua Wang, Yingzhan Yan, Nini Hao

, Shaohui Wang, Xiaohong Ren, Xiongying Ye, Zhaoying Zhou, Chenyang Xue, Jun Liu:
The analysis of microtoroid cavity coupling system based on fullwave. 991-995 - Yuwen Duan, Ru Zhang, Peilin Lang, Ying Zhang:

Flat suppercontinuum generation in the inner cladding fiber with InP nano thin film. 996-999 - Xin Liu, Chenyang Xue, Shubin Yan, Jijun Xiong, Wendong Zhang

:
Integrated high sensitivity displacement sensor based on micro ring resonator. 1000-1003 - Karan Kartik Mehta

, Ting-Hsiang Wu, Eric P. Y. Chiou:
Magnetic nanowire-enhanced optomagnetic tweezers. 1004-1007 - Jun Liu, Guoqing Jiang, Shubin Yan, Shaohui Wang, Yingzhan Yan, Yanfeng Jing, Jijun Xiong, Xiongying Ye, Zhaoying Zhou, Wendong Zhang

:
Design of the miniature optical fiber voltage sensor. 1008-1012 - Jing Wan, Shao-Ren Deng, Yifang Chen, Ejaz Huq, Ran Liu, Xin-Ping Qu:

Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection. 1013-1016 - Min Nie, Pragnesh Patel, Kai Sun, Dennis Desheng Meng:

Superhydrophilic anti-fog polyester film by oxygen plasma treatment. 1017-1020 - Ryan Lemmens, Dennis Desheng Meng:

Wedging leakage flow and its impact on the maximum pressure head of bubble-driven micropumping. 1021-1025 - Wei Qin, Weizheng Yuan, Honglong Chang

, Liang Xue, Guangmin Yuan:
Fuzzy Adaptive Extended Kalman Filter for miniature Attitude and Heading Reference System. 1026-1030 - Liang Xue, Weizheng Yuan, Honglong Chang

, Chengyu Jiang:
MEMS-based multi-sensor integrated attitude estimation technology for MAV applications. 1031-1035 - Yung-Chiang Chung, Yen-Wen Hu, Tsong-Long Hwang

, Po-Wen Chen, Fong-Jian Sie:
Acting force comparison of microbeads and hemocytes in microchannel using optical tweezers system. 1036-1039 - Yu Zhang, Wen Jung Li

, Osamu Tabata:
Extreme-low-power thermal convective accelerometer based on CNT sensing element. 1040-1042 - Peng Xiao, Wen Jung Li

, Ruxu Du:
Experimental investigation of CNT-Based micro bubble generation inside microchannels. 1043-1047 - Li Yang, Mengxing Ouyang, Wen Jung Li

:
Extreme-low power NaOCl sensor using EG-CNTs as Sensing Element. 1048-1053 - Jungil Park, Sunyoung Ahn, Youngmi Kim Pak

, James Jungho Pak:
2 . 1054-1057 - Kang Wu, Xiongying Ye, Feng Chen, Litao Liu, Linrui Guo, Zhaoying Zhou:

Micromachined interferometric accelerometer fabricated using SGADER process. 1058-1061 - Jin-Woo Kim, Hyung-Mo Moon, Steve Tung, Hyun-Ho Lee:

Highly effective bacterial removal system using carbon nanotube clusters. 1062-1064 - Ju Seok Lee, Joon Jin Song, Russell J. Deaton, Jin-Woo Kim:

Exploring the potential of microarray technology for bio/nano sensing. 1065-1068 - Mi-Hyun Kang, Chang-Sin Park, Bo young Choi, Dong-Weon Lee:

Fabrication of a stepped shape tip using a self-descending phenomena of meniscus. 1069-1072 - Jin Qiu, Shawn Cunningham, Arthur Morris:

Effect of sacrificial layer compliance on thermal stresses of composite MEMS beams. 1073-1078 - Zhigang Wu

, Grzegorz Wicher, Asa Fex Svenningsen
, Klas Hjort
:
Microfluidic high viability separation of neural cells. 1079-1083 - Shu Long, Zhong Cao, Yu-Ting Zhao, Yi Zhou, Ming-Xing Wang, Yun-Lin Dai, Fu-Chun Gong, Shu-Zhen Tan:

Multi-wall carbon nanotubes film used for determination of salbutamol sulfate. 1084-1087 - Guangmei Zhai, Hua Gong, Minqiang Wang, Zhonghai Lin, Kaiping Liu, Daoli Zhang:

Low temperature growth of ZnO rods by EDTA-assisted hydrothermal synthesis. 1088-1091 - Chunrong Peng, Shanhong Xia:

A novel micro-electrostatic field sensor based on parallel-plate resonator. 1092-1095 - Jialu Tang, Xiaowei Liu, Haifeng Zhang

, Xilian Wang:
Investigation of electrostatic bonding time model with point cathode. 1096-1098 - Hai-Feng Zhang

, Xiao-wei Liui, Xian-hui Shao, Xi-Lian Wang, Bin Zhou:
The study of the improved wavelet thresholding with translation invariant de-noising on capillary electrophoresis signal. 1099-1102 - Jing Cui, Bingzhen Zhang, Jun Liu, Chengyang Xue, Guowen Liu, Xiaojuan Jia:

Design of a novel sensor based on piezo-resistive effect of GaAs/AlGaAs/InGaAs PHEMT. 1103-1106 - Mingda Zhou, Yilong Hao, Chengchen Gao, Zhihong Li, Qifang Hu:

Fabrication of complicated three dimensional structures utilizing multi-stack bonding. 1107-1111 - Jie Chen, Tao Guo, Hang Guo:

Electron mobility in enhanced N-type silicon nanowire MOSFET. 1112-1116 - Jie Chen, Tao Guo, Hang Guo:

Analysis of high frequency breakdown of noble gases in A MEMS-based Rb-87 lamp for miniaturized passive rubidium atomic clock. 1117-1119

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