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Micromachines, Volume 6
Volume 6, Number 1, January 2015
- Jeong-Bong Lee, Kyung-Hak Choi, Koangki Yoo:
Innovative SU-8 Lithography Techniques and Their Applications. 1-18 - Lamia E. L. Fissi, Victor Xhurdebise, Laurent A. Francis:
Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser. 19-31 - Hanfei Zhang, Yiping Feng, Sunand Santhanagopalan, Dennis Desheng Meng:
Electrophoretic Deposition of Gallium with High Deposition Rate. 32-41 - Chung-Liang Chang, Jin-Long Shie:
Design and Implementation of a Bionic Mimosa Robot with Delicate Leaf Swing Behavior. 42-62 - Ravi Prakash, Kanti Pabbaraju, Sallene Wong, Anita Wong, Raymond Tellier, Karan V. I. S. Kaler:
Multiplex, Quantitative, Reverse Transcription PCR Detection of Influenza Viruses Using Droplet Microfluidic Technology. 63-79 - Florian Thoma, Frank Goldschmidtböing, Peter Woias:
A New Concept of a Drug Delivery System with Improved Precision and Patient Safety Features. 80-95 - Junji Sone, Katsumi Yamada, Akihisa Asami, Jun Chen:
Sub-Micrometer Size Structure Fabrication Using a Conductive Polymer. 96-109 - Casper Hyttel Clausen, Gustav Erik Skands, Christian Vinther Bertelsen, Winnie Edith Svendsen:
Coplanar Electrode Layout Optimized for Increased Sensitivity for Electrical Impedance Spectroscopy. 110-120 - Elmano Pinto, Vera Faustino, Raquel O. Rodrigues, Diana Pinho, Valdemar Garcia, João Mário Miranda, Rui A. Lima:
A Rapid and Low-Cost Nonlithographic Method to Fabricate Biomedical Microdevices for Blood Flow Analysis. 121-135 - Eszter Leelossyné Tóth, Eszter G. Holczer, Kristóf Iván, Péter Fürjes:
Optimized Simulation and Validation of Particle Advection in Asymmetric Staggered Herringbone Type Micromixers. 136-150 - Shubin Yan, Minghui Li, Liang Luo, Kezhen Ma, Chenyang Xue, Wendong Zhang:
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator. 151-159
Volume 6, Number 2, February 2015
- Song-Bin Huang, Yang Zhao, Deyong Chen, Shing-Lun Liu, Yana Luo, Tzu-Keng Chiu, Junbo Wang, Jian Chen, Min-Hsien Wu:
Classification of Cells with Membrane Staining and/or Fixation Based on Cellular Specific Membrane Capacitance and Cytoplasm Conductivity. 163-171 - Ananda Banerjee, Joo Hyon Noh, Yuguang Liu, Philip D. Rack, Ian Papautsky:
Programmable Electrowetting with Channels and Droplets. 172-185 - Miao Xu, Xiahui Wang, Boya Jin, Hongwen Ren:
Infrared Optical Switch Using a Movable Liquid Droplet. 186-195 - Shifei Liu, Mohamed Maher Atia, Yanbin Gao, Aboelmagd Noureldin:
Adaptive Covariance Estimation Method for LiDAR-Aided Multi-Sensor Integrated Navigation Systems. 196-215 - Chi-Han Chiou, Tai-Yen Yeh, Jr-Lung Lin:
Deformation Analysis of a Pneumatically-Activated Polydimethylsiloxane (PDMS) Membrane and Potential Micro-Pump Applications. 216-229 - Xiaowei Liu, Shuo Fang, Zezhong Ma, Yufeng Zhang:
Structure Design and Implementation of the Passive μ-DMFC. 230-238 - Anna Haller, Andreas Spittler, Lukas Brandhoff, Helene Zirath, Dietmar Puchberger-Enengl, Franz Keplinger, Michael J. Vellekoop:
Microfluidic Vortex Enhancement for on-Chip Sample Preparation. 239-251 - Harutaka Mekaru:
Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography. 252-265 - Liang Xue, Chengyu Jiang, Lixin Wang, Jieyu Liu, Weizheng Yuan:
Noise Reduction of MEMS Gyroscope Based on Direct Modeling for an Angular Rate Signal. 266-280 - Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, Jin Ning:
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. 281-290
Volume 6, Number 3, March 2015
- Tatsiana Malechka, Tobias Tetzel, Ulrich Krebs, Diana Feuser, Axel Graeser:
sBCI-Headset - Wearable and Modular Device for Hybrid Brain-Computer Interface. 291-311 - Yu-Jen Wang, Chung-De Chen, Chung-Chih Lin, Jui-Hsin Yu:
A Nonlinear Suspended Energy Harvester for a Tire Pressure Monitoring System. 312-327 - Su Xu, Yan Li, Yifan Liu, Jie Sun, Hongwen Ren, Shin-Tson Wu:
Correction: Xu, S.; Li, Y.; Liu, Y.; Sun, J.; Ren, H.; Wu, S.-T. Fast-Response Liquid Crystal Microlens. Micromachines 2014, 5, 300-324. 328-329 - Alexander L. Rivera, Harihara Baskaran:
The Effect of Biomolecular Gradients on Mesenchymal Stem Cell Chondrogenesis under Shear Stress. 330-346 - Zengshan Tian, Xin Fang, Mu Zhou, Lingxia Li:
Smartphone-Based Indoor IntegratedWiFi/MEMS Positioning Algorithm in a Multi-Floor Environment. 347-363 - Sebastian M. Bonk, Paul Oldorf, Rigo Peters, Werner Baumann, Jan Gimsa:
Fast Prototyping of Sensorized Cell Culture Chips and Microfluidic Systems with Ultrashort Laser Pulses. 364-374 - Yu-Jen Wang, Yu-Ti Hao, Hao-Yu Lin:
Design of a Weighted-Rotor Energy Harvester Based on Dynamic Analysis and Optimization of Circular Halbach Array Magnetic Disk. 375-389 - Xiaodong Deng, Yihu Li, Wen Wu, Yong-Zhong Xiong:
A Compact W-Band Reflection-Type Phase Shifter with Extremely Low Insertion Loss Variation Using 0.13 µm CMOS Technology. 390-395 - Jing-Quan Liu, Yue-Feng Rui, Xiaoyang Kang, Bin Yang, Xiang Chen, Chunsheng Yang:
A Novel Transdermal Power Transfer Device for the Application of Implantable Microsystems. 396-408
Volume 6, Number 4, April 2015
- Maho Kaminaga, Tadashi Ishida, Tetsuya Kadonosono, Shinae Kizaka-Kondoh, Toru Omata:
Uniform Cell Distribution Achieved by Using Cell Deformation in a Micropillar Array. 409-422 - Sabrina Kartmann, Peter Koltay, Roland Zengerle, Andreas Ernst:
A Disposable Dispensing Valve for Non-Contact Microliter Applications in a 96-Well Plate Format. 423-436 - Germán Comina, Anke Suska, Daniel Filippini:
3D Printed Unibody Lab-on-a-Chip: Features Survey and Check-Valves Integration. 437-451 - Egbert van der Wouden, Jarno Groenesteijn, Remco J. Wiegerink, Joost C. Lötters:
Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition. 452-461 - Guowei Zhong, Jinxia Liu, Xinyu Liu:
A Fast Colourimetric Assay for Lead Detection Using Label-Free Gold Nanoparticles (AuNPs). 462-472 - Tom H. Platenkamp, Wouter Sparreboom, Gijs H. J. M. Ratering, Marcel R. Katerberg, Joost C. Lötters:
Low Flow Liquid Calibration Setup. 473-486 - Dachuan Li, Qing Li, Liang-wen Tang, Sheng Yang, Nong Cheng, Jingyan Song:
Invariant Observer-Based State Estimation for Micro-Aerial Vehicles in GPS-Denied Indoor Environments Using an RGB-D Camera and MEMS Inertial Sensors. 487-522 - Zhi-An Deng, Ying Hu, Jianguo Yu, Zhenyu Na:
Extended Kalman Filter for Real Time Indoor Localization by Fusing WiFi and Smartphone Inertial Sensors. 523-543
Volume 6, Number 5, May 2015
- Nolwenn Huby, John Bigeon, Gwennaël Danion, Jean-Luc Duvail, Françis Gouttefangeas, Loïc Joanny, Bruno Bêche:
Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures. 544-553 - Jiahong Zhang, Yusheng Wu, Qingquan Liu, Fang Gu, Xiaoli Mao, Min Li:
Research on High-Precision, Low Cost Piezoresistive MEMS-Array Pressure Transmitters Based on Genetic Wavelet Neural Networks for Meteorological Measurements. 554-573 - Itziar González, María Tijero, Alain Martin, Victor Acosta, Javier Berganzo, Adela Castillejo, Mounir M. Bouali, Jose Luis Soto:
Optimizing Polymer Lab-on-Chip Platforms for Ultrasonic Manipulation: Influence of the Substrate. 574-591 - Chao Liu, Qiang Li, Yihu Li, Xiang Li, Haitao Liu, Yong-Zhong Xiong:
Design of 340 GHz 2× and 4× Sub-Harmonic Mixers Using Schottky Barrier Diodes in Silicon-Based Technology. 592-599 - Héctor Hugo Pérez Garza, Murali Krishna Ghatkesar, Shibabrata Basak, Per Löthman, Urs Staufer:
Nano-Workbench: A Combined Hollow AFM Cantilever and Robotic Manipulator. 600-610 - Leili Batooli, Sandra Guadalupe Maldonado, Moshe Judelewicz, Stefano Mischler:
Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS. 611-621 - Dong Hyun Yoon, Kenta Hasegawa, Yuji Kaneko, Takahiro Arakawa, Jeung Sang Go, Tetsushi Sekiguchi, Shuichi Shoji:
Formation of Polymeric Hollow Microcapsules and Microlenses Using Gas-in-Organic-in-Water Droplets. 622-633 - Lisa Schott, Christian Sommer, Joern Wittek, Khaliun Myagmar, Thomas Walther, Michael Baßler:
Cell Size Discrimination Based on the Measurement of the Equilibrium Velocity in Rectangular Microchannels. 634-647 - Kou Nakahara, Shinya Sakuma, Takeshi Hayakawa, Fumihito Arai:
On-Chip Transportation and Measurement of Mechanical Characteristics of Oocytes in an Open Environment. 648-659
Volume 6, Number 6, June 2015
- Hirotaka Sugiura, Shinya Sakuma, Makoto Kaneko, Fumihito Arai:
On-Chip Method to Measure Mechanical Characteristics of a Single Cell by Using Moiré Fringe. 660-673 - Chih-Lang Lin, Yu-Sheng Lin, Patrice L. Baldeck:
Rotational Efficiency of Photo-Driven Archimedes Screws for Micropumps. 674-683 - Jieyu Liu, Qiang Shen, Weiwei Qin:
Signal Processing Technique for Combining Numerous MEMS Gyroscopes Based on Dynamic Conditional Correlation. 684-698 - Jingbin Liu, Lingli Zhu, Yunsheng Wang, Xinlian Liang, Juha Hyyppä, Tianxing Chu, Keqiang Liu, Ruizhi Chen:
Reciprocal Estimation of Pedestrian Location and Motion State toward a Smartphone Geo-Context Computing Solution. 699-717 - Herbert Bousack, Thilo Kahl, Anke Schmitz, Helmut Schmitz:
Towards Improved Airborne Fire Detection Systems Using Beetle Inspired Infrared Detection and Fire Searching Strategies. 718-746 - You Li, Yuan Zhuang, Haiyu Lan, Peng Zhang, Xiaoji Niu, Naser El-Sheimy:
WiFi-Aided Magnetic Matching for Indoor Navigation with Consumer Portable Devices. 747-764 - Dong-Jin Kang:
Effects of Baffle Configuration on Mixing in a T-Shaped Micro-Channel. 765-777 - Weiwei Cui, Menglun Zhang, Xuexin Duan, Wei Pang, Daihua Zhang, Hao Zhang:
Dynamics of Electrowetting Droplet Motion in Digital Microfluidics Systems: From Dynamic Saturation to Device Physics. 778-789 - Arnaud Bertsch, Philippe Renaud:
Special Issue: 15 Years of SU8 as MEMS Material. 790-792 - Yuan Zhuang, Haiyu Lan, You Li, Naser El-Sheimy:
PDR/INS/WiFi Integration Based on Handheld Devices for Indoor Pedestrian Navigation. 793-812
Volume 6, Number 7, July 2015
- Ying Lin, Xinhai Yu, Zhenyu Wang, Shan-Tung Tu, Zhengdong Wang:
Effect of Laser-Induced Heating on Raman Measurement within a Silicon Microfluidic Channel. 813-830 - Junko Kojima, Samiko Hosoya, Chihiro Suminaka, Nobuyasu Hori, Toshiyuki Sato:
An Integrated Glucose Sensor with an All-Solid-State Sodium Ion-Selective Electrode for a Minimally Invasive Glucose Monitoring System. 831-841 - Shakhawat Hossain, Kwang-Yong Kim:
Mixing Performance of a Serpentine Micromixer with Non-Aligned Inputs. 842-854 - Junshan Liu, Guoge Zong, Licheng He, Yangyang Zhang, Chong Liu, Liding Wang:
Effects of Fumed and Mesoporous Silica Nanoparticles on the Properties of Sylgard 184 Polydimethylsiloxane. 855-864 - Mohammad Amri Zainal, Shafishuhaza Sahlan, Mohamed Sultan Mohamed Ali:
Micromachined Shape-Memory-Alloy Microactuators and Their Application in Biomedical Devices. 879-901 - Jiangcheng Chen, Xiaodong Zhang, Shengmao Lin, He Wang, Linxia Gu:
Multiscale Modeling of Skeletal Muscle Active Contraction in Relation to Mechanochemical Coupling of Molecular Motors. 902-914 - Qian-Fang Meng, Lang Rao, Bo Cai, Su-Jian You, Shi-Shang Guo, Wei Liu, Xing-Zhong Zhao:
A Concentration-Controllable Microfluidic Droplet Mixer for Mercury Ion Detection. 915-925 - Haiyu Lan, Chunyang Yu, Yuan Zhuang, You Li, Naser El-Sheimy:
A Novel Kalman Filter with State Constraint Approach for the Integration of Multiple Pedestrian Navigation Systems. 926-952 - Ala'aldeen Al-Halhouli, Aiman Alshare, Mukeet Mohsen, Maher Matar, Andreas Dietzel, Stephanus Büttgenbach:
Passive Micromixers with Interlocking Semi-Circle and Omega-Shaped Modules: Experiments and Simulations. 953-968
Volume 6, Number 8, August 2015
- Huixia Liu, Jianwen Li, Zongbao Shen, Qing Qian, Hongfeng Zhang, Xiao Wang:
Experimental and Numerical Simulation Research on Micro-Gears Fabrication by Laser Shock Punching Process. 969-983 - Huicong Liu, Tao Chen, Lining Sun, Chengkuo Lee:
An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes. 984-992 - José-Fermi Guerrero-Castellanos, Hala Rifai, Nicolas Marchand, Rafael Cruz-José, Samer Mohammed, W. Fermín Guerrero-Sánchez, Gerardo Mino Aguilar:
Biomimetic-Based Output Feedback for Attitude Stabilization of Rigid Bodies: Real-Time Experimentation on a Quadrotor. 993-1022 - Mengxing Wang, Yue Zhang, Xiaoxuan Zhao, Weisheng Zhao:
Tunnel Junction with Perpendicular Magnetic Anisotropy: Status and Challenges. 1023-1045 - Alexis Peschot, Chuang Qian, Tsu-Jae King Liu:
Nanoelectromechanical Switches for Low-Power Digital Computing. 1046-1065 - Yue Wu, Jingshi Dong, Xinbo Li, Zhigang Yang, Qingping Liu:
Non-Linear Piezoelectric Actuator with a Preloaded Cantilever Beam. 1066-1081 - Xiaoji Niu, Yalong Ban, Quan Zhang, Tisheng Zhang, Hongping Zhang, Jingnan Liu:
Quantitative Analysis to the Impacts of IMU Quality in GPS/INS Deep Integration. 1082-1099 - Sara Saeedi, Naser El-Sheimy:
Activity Recognition Using Fusion of Low-Cost Sensors on a Smartphone for Mobile Navigation Application. 1100-1134 - Cheng-Chih Hsu, Yu-Ching Liao, Yen-Ting Tsai, Hsin-I Yeh, Chyan-Chyi Wu:
Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration. 1135-1142 - Yasser Aboelkassem:
Insect-Inspired Micropump: Flow in a Tube with Local Contractions. 1143-1156 - Miao Xu, Xiahui Wang, Hongwen Ren:
Tunable Focus Liquid Lens with Radial-Patterned Electrode. 1157-1165 - Vladimir Viktorov, Md Readul Mahmud, Carmen Visconte:
Comparative Analysis of Passive Micromixers at a Wide Range of Reynolds Numbers. 1166-1179 - Friedrich Schuler, Nils Paust, Roland Zengerle, Felix von Stetten:
Centrifugal Step Emulsification can Produce Water in Oil Emulsions with Extremely High Internal Volume Fractions. 1180-1188 - Hendrik Herzog, Siegfried Steltenkamp, Adrian Klein, Simon Tätzner, Elisabeth Schulze, Horst Bleckmann:
Micro-Machined Flow Sensors Mimicking Lateral Line Canal Neuromasts. 1189-1212
Volume 6, Number 9, September 2015
- Valeria Loscrì, Anna Maria Vegni, Giancarlo Fortino:
On the Interaction between a Nanoparticulate System and the Human Body in Body Area Nanonetworks. 1213-1235 - Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning:
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. 1236-1248 - Wei-Lung Chou, Pee-Yew Lee, Cing-Long Yang, Wen-Ying Huang, Yung-Sheng Lin:
Recent Advances in Applications of Droplet Microfluidics. 1249-1271 - Qiang Fu, Shuxiang Guo, Songyuan Zhang, Hideyuki Hirata, Hidenori Ishihara:
Characteristic Evaluation of a Shrouded Propeller Mechanism for a Magnetic Actuated Microrobot. 1272-1288 - Mohamed Yafia, Ali Ahmadi, Mina Hoorfar, Homayoun Najjaran:
Ultra-Portable Smartphone Controlled Integrated Digital Microfluidic System in a 3D-Printed Modular Assembly. 1289-1305 - Zhixin Zhang, Ji Liang, Daihua Zhang, Wei Pang, Hao Zhang:
A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications. 1306-1316 - Shuangxi Xie, Niandong Jiao, Steve Tung, Lianqing Liu:
Fabrication of SWCNT-Graphene Field-Effect Transistors. 1317-1330 - Juan Wang, Mingliang Jin, Tao He, Guofu Zhou, Lingling Shui:
Microfluidic Induced Controllable Microdroplets Assembly in Confined Channels. 1331-1345 - Tiantian Xu, Jiangfan Yu, Xiaohui Yan, Hongsoo Choi, Li Zhang:
Magnetic Actuation Based Motion Control for Microrobots: An Overview. 1346-1364 - Christos-Edward Athanasiou, Yves Bellouard:
A Monolithic Micro-Tensile Tester for Investigating Silicon Dioxide Polymorph Micromechanics, Fabricated and Operated Using a Femtosecond Laser. 1365-1386 - Xiaolu Zhu:
Manipulation of Self-Assembled Microparticle Chains by Electroosmotic Flow Assisted Electrorotation in an Optoelectronic Device. 1387-1405 - Ashwin Acharya, Muthukumaran Packirisamy, Ricardo Izquierdo:
OLED Hybrid Integrated Polymer Microfluidic Biosensing for Point of Care Testing. 1406-1420
Volume 6, Number 10, October 2015
- Nga Hung Poon, Yan Yan, Li Zhou, Desong Wang, Chi Hou Chan, Vellaisamy A. L. Roy:
Frequency Selective Surfaces with Nanoparticles Unit Cell. 1421-1426 - Jianguo Zhang, Quansong Li, Hui Zhang, Yongxin Sui, Huaijiang Yang:
Investigation of Micro Square Structure Fabrication by Applying Textured Cutting Tool in WEDM. 1427-1434 - Takasi Nisisako, Haruka Suzuki, Takeshi Hatsuzawa:
Biconvex Polymer Microlenses with Tunable Imaging Properties Designed by Janus Droplet Microfluidics. 1435-1444 - Shazia Bashir, Muhammad Bashir, Xavier Casadevall i Solvas, Julia M. Rees, William B. Zimmerman:
Hydrophilic Surface Modification of PDMS Microchannel for O/W and W/O/W Emulsions. 1445-1458 - Jingmei Li, Zhou Liu, Haibo Huang, Ho Cheung Shum:
Shielding Electric Fields to Prevent Coalescence of Emulsions in Microfluidic Channels Using a 3D Metallic Coil. 1459-1468 - Louai Labanieh, Thi N. Nguyen, Weian Zhao, Dongku Kang:
Floating Droplet Array: An Ultrahigh-Throughput Device for Droplet Trapping, Real-time Analysisand Recovery. 1469-1482 - Weiyuan Chen, Wenlang Lai, Yuming Wang, Kaijun Wang, Shengyu Lin, Yuli Yen, Hong Hocheng, Tahsin Chou:
Ultrafast Laser Engraving Method to Fabricate Gravure Plate for Printed Metal-Mesh Touch Panel. 1483-1489 - Kuangwen Hsieh, Helena C. Zec, Polly C. Ma, Tushar D. Rane, Tza-Huei Wang:
Enhancing Throughput of Combinatorial Droplet Devices via Droplet Bifurcation, Parallelized Droplet Fusion, and Parallelized Detection. 1490-1504 - Marianne Smedegaard Hede, Patricia Nkem Okorie, Signe Kirk Fruekilde, Søren Fjelstrup, Jonas Thomsen, Oskar Franch, Cinzia Tesauro, Magnus Tobias Bugge, Mette Christiansen, Stéphane Picot, Felix Lötsch, Ghyslain Mombo-Ngoma, Johannes Mischlinger, Ayôla A. Adegnika, Finn Skou Pedersen, Yi-Ping Ho, Eskild Petersen, Magnus Stougaard, Michael Ramharter, Birgitta Ruth Knudsen:
Refined Method for Droplet Microfluidics-Enabled Detection of Plasmodium falciparum Encoded Topoisomerase I in Blood from Malaria Patients. 1505-1513 - Krzysztof Churski, Artur Ruszczak, Slawomir Jakiela, Piotr Garstecki:
Droplet Microfluidic Technique for the Study of Fermentation. 1514-1525 - Kazuki Maeda, Hiroaki Onoe, Masahiro Takinoue, Shoji Takeuchi:
Observation and Manipulation of a Capillary Jet in a Centrifuge-Based Droplet Shooting Device. 1526-1533 - Tiago S. Monteiro, Pamakstys Kastytis, Luís Miguel Gonçalves, Graça Minas, Susana Cardoso:
Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation. 1534-1545 - Wenfeng Wan, Gaole Dai, Lijun Zhang, Yajing Shen:
Paper-Based Electrodeposition Chip for 3D Alginate Hydrogel Formation. 1546-1559 - Shih-Wen Peng, Po-Jen Shih, Ching-Liang Dai:
Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology. 1560-1568 - Jian-Qiu Huang, Fei Li, Min Zhao, Kai Wang:
A Surface Micromachined CMOS MEMS Humidity Sensor. 1569-1576 - Taotao Zhang, Kun Ma:
Analysis of Dynamic Properties of Piezoelectric Structure under Impact Load. 1577-1587
Volume 6, Number 11, November 2015
- Philipp Frank, Sebastian Haefner, Georgi Paschew, Andreas Richter:
Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves. 1588-1596 - Jiaqi Wang, Jun Yu:
Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor. 1597-1605 - Zhuo Wang, Quanzhong Zhao, Chengwei Wang:
Reduction of Friction of Metals Using Laser-Induced Periodic Surface Nanostructures. 1606-1616 - Yi-Ta Wang, Yuh-Chung Hu, Wen-Chang Chu, Pei-Zen Chang:
The Fringe-Capacitance of Etching Holes for CMOS-MEMS. 1617-1628 - Deyong Zhu, Xiaohu Zhou, Bo Zheng:
A Double Emulsion-Based, Plastic-Glass Hybrid Microfluidic Platform for Protein Crystallization. 1629-1644 - Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai:
Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology. 1645-1654