Tadahiro Ohmi

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

◀ ▶ joint publications with Hiroaki Tanaka

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Publications

2007
[j35]
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Koutarou Tanaka, Hiroaki Tanaka, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi:
High quality gate insulator film formation on SiC using by microwave-excited high-density plasma. Microelectron. Reliab. 47(4-5): 786-789 (2007)
2006
[j27]
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  - journals/mj/ZhongTSO06
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Chuan Jie Zhong, Hiroaki Tanaka, Shigetoshi Sugawa, Tadahiro Ohmi:
High quality silicon nitride deposited by Ar/N₂/H₂/SiH₄ high-density and low energy plasma at low temperature. Microelectron. J. 37(1): 44-49 (2006)

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