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S. B. Ge

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2011
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X. M. Yang, L. J. Zhuge, X. M. Wu, T. Yu, S. B. Ge:
The influence of assisted ion beam bombardment on structure and electrical characteristics of HfSiO dielectric synthesized by DIBSD. Microelectron. Reliab. 51(12): 2115-2118 (2011)

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