Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning.

Sat, 01 Jan 2011 00:00:00 +0100

Chen-Fu Chien , Ying-Jen Chen, Chia-Yu Hsu, Yi-Hao Yeh:
Manufacturing intelligence for determining machine subgroups to enhance yield in semiconductor manufacturning. WSC 2011: 1898-1907