Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer.

Wed, 01 Jan 2014 00:00:00 +0100

Yong-Kang Tao, Yunfeng Liu, Jing-Xin Dong:
Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer. Microelectron. Reliab. 54(6-7): 1328-1337 (2014)