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Xiang-meng Jing

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2007
[j1]
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Xiang-meng Jing, Di Chen, Dong-Ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen:
Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology. Microelectron. J. 38(1): 120-124 (2007)

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