Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films.

Sat, 01 Jan 2005 00:00:00 +0100

M. Serényi, J. Betko, Ákos Nemcsics, N. Q. Khanh, D. K. Basa, M. Morvic:
Study on the RF Sputtered hydrogenated amorphous silicon-germanium thin films. Microelectron. Reliab. 45(7-8): 1252-1256 (2005)