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2020 – today
- 2021
[c6]Xiaoxu Kang, Xiaolan Zhong, Zhangfa Chen, Zhengkai Dao, Qiang Zhang, Hao Wan, Yamin Zhou, Ming Li, Yingjia Guo, Ran Nie, Tao Wu:
Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application. ASICON 2021: 1-3- [c5]Ming Li, Xiaoxu Kang, Xiaolan Zhong:
Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor. ASICON 2021: 1-3 - [c4]Ming Li, Xiaoxu Kang, Xiaolan Zhong:
A Novel Etch Scheme to Form Sloped Profile by Standard Anisotropic CMOS Process. ASICON 2021: 1-4 - [c3]Bo Zhang, Xiaoxu Kang, Xiaolan Zhong:
Optimization of Protective Layer Process for Micro-bridge Structure based MEMS/Sensors Application. ASICON 2021: 1-4
2010 – 2019
- 2019
- [c2]Xiaoxu Kang, Xiaolan Zhong, Ming Li:
Development and Optimization of Contact Module Process for Micro-Bridge Structure based MEMS/Sensor Application. ASICON 2019: 1-4 - 2017
- [c1]Xiaoxu Kang
, Limin Zhu, Xingwang Zhu, Qingyun Zuo, Xiaolan Zhong, Shoumian Chen, Yuhang Zhao, Shanshan Liu, Hanwei Lu, Jianmin Wang, Wei Wang, Bo Zhang:
Development and characterization of TaN thin film resistor with CMOS compatible fabrication process. ASICON 2017: 160-162
Coauthor Index
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