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M. Haverty

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2019
[c1]
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Sushant Mittal, Ashish Pal, Mehdi Saremi, J. Ferrell, M. Haverty, T. Miyashita, N. Kim, El Mehdi Bazizi, Blessy Alexander, A. B. Sachid, Buvna Ayyagari:
Highly-Doped Through-Contact Silicon Epi Design at 3 nm node. DRC 2019: 55-56

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