Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning.

Fri, 01 Jan 2021 00:00:00 +0100

Chen Yang , Nicolas Verbeek , Fangzhou Xia , Yi Wang, Kamal Youcef-Toumi:
Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning. IEEE Trans. Ind. Electron. 68(9): 8550-8560 (2021)