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Richard S. Muller

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Journal Articles

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1998
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James M. Bustillo, Roger T. Howe, Richard S. Muller:
Surface micromachining for microelectromechanical systems. Proc. IEEE 86(8): 1552-1574 (1998)
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Richard S. Muller, Kam Y. Lau:
Surface-micromachined microoptical elements and systems. Proc. IEEE 86(8): 1705-1720 (1998)

Conference and Workshop Papers

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2015
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Tae Joon Seok, Niels Quack, Sangyoon Han, Wencong Zhang, Richard S. Muller, Ming C. Wu:
64×64 Low-loss and broadband digital silicon photonic MEMS switches. ECOC 2015: 1-3

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