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Michael Lercel

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affiliation: ASML US, Wilton, CT, USA

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2022
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Martin van den Brink, Anthony Yen, Paul van Wijnen, Michael Lercel, Boudewijn Sluijk:
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond. VLSI Technology and Circuits 2022: 3-7

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