Theoretical investigation on hermeticity testing of MEMS packages based on MIL-STD-883E.

Sat, 01 Jan 2005 00:00:00 +0100

Yi Tao, Ajay P. Malshe:
Theoretical investigation on hermeticity testing of MEMS packages based on MIL-STD-883E. Microelectron. Reliab. 45(3-4): 559-566 (2005)