Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance.

Tue, 01 Jan 2002 00:00:00 +0100

Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi:
Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectron. Reliab. 42(2): 201-209 (2002)