A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing.

Sun, 01 Jan 2023 00:00:00 +0100

Eunji Kim , Jinwon An, Hyunchang Cho, Sungzoon Cho, Byeongeon Lee:
A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing. Data Technol. Appl. 57(3): 397-417 (2023)