A Reflected-Light-Mode Multiwavelength Interferometer for Measurement of Step Height Standards.

Thu, 01 Aug 2024 01:00:00 +0200

Dariusz Litwin , Kamil Radziak , Adam Czyzewski, Jacek Galas , Tadeusz Kryszczynski, Narcyz Blocki, Robert Szumski, Justyna Niedziela:
A Reflected-Light-Mode Multiwavelength Interferometer for Measurement of Step Height Standards. Sensors 24(16): 5082 (2024)