Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing.

Tue, 01 Apr 2025 01:00:00 +0200

Seunghyon Kang, Hyeonghun Kim, Boris Kramer:
Parametric Operator Inference to Simulate the Purging Process in Semiconductor Manufacturing. CoRR abs/2504.03990 (2025)