A real-time wafer lithography area scheduling approach integrating transformer with double deep Q-network.

Sun, 01 Feb 2026 00:00:00 +0100

Lihui Wu, Keshan Jin, Jinming Shi, Jie Zhang, Junliang Wang:
A real-time wafer lithography area scheduling approach integrating transformer with double deep Q-network. Enterp. Inf. Syst. 20(2) (2026)