A study on flare minimisation in EUV lithography by post-layout re-allocation of wire segments.

Fri, 01 Jan 2021 00:00:00 +0100

Sudipta Paul , Pritha Banerjee , Susmita Sur-Kolay :
A study on flare minimisation in EUV lithography by post-layout re-allocation of wire segments. IET Circuits Devices Syst. 15(4): 310-329 (2021)