Flare reduction in EUV Lithography by perturbation of wire segments.

Thu, 01 Jan 2015 00:00:00 +0100

Sudipta Paul, Pritha Banerjee , Susmita Sur-Kolay:
Flare reduction in EUV Lithography by perturbation of wire segments. VLSI-SoC 2015: 7-12