Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure.

Mon, 01 Jan 2001 00:00:00 +0100

Sukhan Lee, Jaewoo Chung, Seungmo Lim, Changseung Lee:
Micro Fluid device Using Thick Layer Piezo Actuator Prepared on Si Micro-machined Structure. ICRA 2001: 616-619