Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note).

Tue, 01 Jan 2002 00:00:00 +0100

Samuel G. Webster, Matthias K. Gobbert, Jean-François Remacle , Timothy S. Cale:
Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note). Euro-Par 2002: 452-456