The Combination of Equipment Scale and Feature Scale Models for Chemical Vapor Deposition Via a Homogenization Technique.

Thu, 01 Jan 1998 00:00:00 +0100

Matthias K. Gobbert, Timothy S. Cale, Christian A. Ringhofer:
The Combination of Equipment Scale and Feature Scale Models for Chemical Vapor Deposition Via a Homogenization Technique. VLSI Design 6(1-4): 399-403 (1998)