A Homogenization Technique for the Boltzmann Equation for Low Pressure Chemical Vapor Deposition.

Wed, 01 Jan 2003 00:00:00 +0100

Christian A. Ringhofer, Matthias K. Gobbert:
A Homogenization Technique for the Boltzmann Equation for Low Pressure Chemical Vapor Deposition. SIAM J. Appl. Math. 64(1): 196-215 (2003)