Fabrication Process for Josephson Integrated Circuits.

Tue, 01 Jan 1980 00:00:00 +0100

J. H. Greiner, Charles J. Kircher, S. P. Klepner, S. K. Lahiri, A. J. Warnecke, S. Basavaiah, E. T. Yen, John M. Baker, P. R. Brosious, H.-C. W. Huang, M. Murakami, Irving Ames:
Fabrication Process for Josephson Integrated Circuits. IBM J. Res. Dev. 24(2): 195-205 (1980)