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BibTeX record conf/3dic/AlapatiTOTVCJVMFWPZSMM09
@inproceedings{DBLP:conf/3dic/AlapatiTOTVCJVMFWPZSMM09, author = {Ramakanth Alapati and Youssef Travaly and Jan Van Olmen and Ricardo Cotrin Teixeira and Jan Vaes and Marc van Cauwenbergh and Anne Jourdain and Greet Verbinnen and Gino Marcuccilli and Glenn Florence and Shay Wolfling and Christine Pelissier and Haiping Zhang and Jaydeep Sinha and Andreas Machura and Irfan Malik}, title = {{TSV} metrology and inspection challenges}, booktitle = {{IEEE} International Conference on 3D System Integration, 3DIC 2009, San Francisco, California, USA, 28-30 September 2009}, pages = {1--4}, publisher = {{IEEE}}, year = {2009}, url = {https://doi.org/10.1109/3DIC.2009.5306573}, doi = {10.1109/3DIC.2009.5306573}, timestamp = {Sun, 25 Oct 2020 22:39:26 +0100}, biburl = {https://dblp.org/rec/conf/3dic/AlapatiTOTVCJVMFWPZSMM09.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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