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BibTeX record conf/3dic/SongHY14
@inproceedings{DBLP:conf/3dic/SongHY14, author = {Young Sik Song and Yunho Han and Tai Hong Yim}, title = {Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting}, booktitle = {2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale, Ireland, December 1-3, 2014}, pages = {1--4}, publisher = {{IEEE}}, year = {2014}, url = {https://doi.org/10.1109/3DIC.2014.7152169}, doi = {10.1109/3DIC.2014.7152169}, timestamp = {Wed, 16 Oct 2019 14:14:50 +0200}, biburl = {https://dblp.org/rec/conf/3dic/SongHY14.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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