BibTeX record conf/icmens/BednarzikSBSL03

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@inproceedings{DBLP:conf/icmens/BednarzikSBSL03,
  author    = {Martin Bednarzik and
               Heinz{-}Ulrich Scheunemann and
               Alexander Barth and
               Daniel Schondelmaier and
               Bernd Loechel},
  title     = {First Results in Patterning of Ultra High Aspect Ratio Microstructures
               by a 4T Wave Length Shifter at {BESSY}},
  booktitle = {2003 International Conference on MEMS, NANO, and Smart Systems {(ICMENS}
               2003), 20-23 July 2003, Banff, Alberta, Canada},
  pages     = {177},
  publisher = {{IEEE} Computer Society},
  year      = {2003},
  url       = {https://doi.org/10.1109/ICMENS.2003.1221989},
  doi       = {10.1109/ICMENS.2003.1221989},
  timestamp = {Wed, 16 Oct 2019 14:14:54 +0200},
  biburl    = {https://dblp.org/rec/conf/icmens/BednarzikSBSL03.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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