BibTeX record conf/irps/MachaniGBKP15

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@inproceedings{DBLP:conf/irps/MachaniGBKP15,
  author       = {Kashi Vishwanath Machani and
                  Holm Geisler and
                  Dirk Breuer and
                  Frank Kuechenmeister and
                  Jens Paul},
  title        = {Mechanical reliability assessment of 28nm Back End of Line (BEoL)
                  stack using finite element analysis and validation},
  booktitle    = {{IEEE} International Reliability Physics Symposium, {IRPS} 2015, Monterey,
                  CA, USA, April 19-23, 2015},
  pages        = {1},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/IRPS.2015.7112789},
  doi          = {10.1109/IRPS.2015.7112789},
  timestamp    = {Wed, 16 Oct 2019 14:14:55 +0200},
  biburl       = {https://dblp.org/rec/conf/irps/MachaniGBKP15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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