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BibTeX record conf/isqed/PengZWY10
@inproceedings{DBLP:conf/isqed/PengZWY10, author = {Yao Peng and Jinyu Zhang and Yan Wang and Zhiping Yu}, title = {High performance source optimization using a gradient-based method in optical lithography}, booktitle = {11th International Symposium on Quality of Electronic Design {(ISQED} 2010), 22-24 March 2010, San Jose, CA, {USA}}, pages = {108--113}, publisher = {{IEEE}}, year = {2010}, url = {https://doi.org/10.1109/ISQED.2010.5450390}, doi = {10.1109/ISQED.2010.5450390}, timestamp = {Thu, 13 Oct 2022 17:08:41 +0200}, biburl = {https://dblp.org/rec/conf/isqed/PengZWY10.bib}, bibsource = {dblp computer science bibliography, https://dblp.org} }
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