BibTeX record conf/nems/ParkLC11

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@inproceedings{DBLP:conf/nems/ParkLC11,
  author       = {Jaehong Park and
                  Sangmin Lee and
                  Dong{-}Il Cho},
  title        = {Comparative study of the wafer bonding processes for {MEMS} devices},
  booktitle    = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
                  Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages        = {638--641},
  publisher    = {{IEEE}},
  year         = {2011},
  url          = {https://doi.org/10.1109/NEMS.2011.6017436},
  doi          = {10.1109/NEMS.2011.6017436},
  timestamp    = {Wed, 10 Feb 2021 08:41:52 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ParkLC11.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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